Physics of radio-frequency plasmas

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Bibliographic Details
Main Author Chabert, Pascal, 1969-
Other Authors Braithwaite, Nicholas
Format eBook
LanguageEnglish
Published Cambridge ; New York : Cambridge University Press, 2011.
Subjects
Low temperature plasmas.
Radio frequency.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780511861017
9780511974342
9780511856662
9780521763004
Physical Description1 online zdroj (viii, 385 p.) : ill.

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Table of Contents:
  • Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.

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