Physics of radio-frequency plasmas

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Bibliographic Details
Main Author: Chabert, Pascal, 1969-
Other Authors: Braithwaite, Nicholas
Format: eBook
Language: English
Published: Cambridge ; New York : Cambridge University Press, 2011.
Subjects:
Low temperature plasmas.
Radio frequency.
elektronické knihy
electronic books
ISBN: 9780511861017
9780511974342
9780511856662
9780521763004
Physical Description: 1 online zdroj (viii, 385 p.) : ill.

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020 |a 9780511861017  |q (ebook) 
020 |a 9780511974342  |q (ebook) 
020 |a 9780511856662  |q (ebook) 
020 |z 9780521763004 
035 |a (OCoLC)706661843 
040 |a N$T  |b eng  |c N$T  |d E7B  |d OCLCQ  |d UIU  |d KNOVL  |d DEBSZ  |d OCLCQ  |d ZCU  |d OCLCQ  |d YDXCP  |d KNOVL 
100 1 |a Chabert, Pascal,  |d 1969- 
245 1 0 |a Physics of radio-frequency plasmas  |h [elektronický zdroj] /  |c Pascal Chabert, Nicholas Braithwaite. 
260 |a Cambridge ;  |a New York :  |b Cambridge University Press,  |c 2011. 
300 |a 1 online zdroj (viii, 385 p.) :  |b ill. 
520 |a "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--  |c Provided by publisher. 
504 |a Includes bibliographical references (p. 375-382) and index. 
505 8 |a Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index. 
590 |a Knovel Library  |b ACADEMIC - Electronics & Semiconductors 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity 
650 0 |a Low temperature plasmas. 
650 0 |a Radio frequency. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Braithwaite, Nicholas  |q (Nicholas St. J.) 
776 0 8 |i Print version:  |a Chabert, Pascal, 1969-  |t Physics of Radio-Frequency Plasmas.  |d Cambridge ; New York : Cambridge University Press, 2011, ©2011  |z 9780521763004  |w (DLC) 2010042728  |w (OCoLC)651917375 
856 4 0 |u https://proxy.k.utb.cz/login?url=http://app.knovel.com/hotlink/toc/id:kpPRFP0003/physics_of_radiofrequency_plasmas  |y Plný text 
992 |a BK  |c KNOVEL 
999 |c 78985  |d 78985 
993 |x NEPOSILAT  |y EIZ 

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