Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis.

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Bibliographic Details
Main Authors Cuomo, Jerome J. (Author, Editor), Kaufman, Harold R. (Author, Editor), Haber, Stephen M. (Author, Editor)
Other Authors Rossnagel, Stephen M. (Editor)
Format eBook
LanguageEnglish
Published Burlington : Saint Louis : Noyes Publications [Imprint] William Andrew, Inc. Elsevier Science & Technology Books [distributor] Dec. 1989
Subjects
Online AccessFull text
ISBN9780815511991
Physical Description1 online zdroj (456 p.) ill.

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650 0 |a Ion implantation. 
650 0 |a Ion bombardment  |x Industrial applications. 
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700 1 |a Kaufman, Harold R.,  |e Author  |e Editor.  |4 edt 
700 1 |a Haber, Stephen M.,  |e Author  |e Editor.  |4 edt 
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