Staff View: Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis.

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Bibliographic Details
Main Authors:	Cuomo, Jerome J., (Editor), Kaufman, Harold R., (Editor), Haber, Stephen M., (Editor)
Other Authors:	Rossnagel, Stephen M., (Editor)
Format:	eBook
Language:	English
Published:	Burlington : Saint Louis : Noyes Publications [Imprint] William Andrew, Inc. Elsevier Science & Technology Books [distributor] Dec. 1989
Subjects:	Ion implantation. Ion bombardment > Industrial applications. elektronické knihy electronic books
ISBN:	9780815511991
Physical Description:	1 online zdroj (456 p.) ill.


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100	1		\|a Cuomo, Jerome J., \|e Author \|e Editor. \|4 edt
245	1	0	\|a Handbook of Ion Beam Processing Technology \|h [elektronický zdroj]: \|b Principles, Deposition, Film Modification and Synthesis.
260			\|b Noyes Publications [Imprint] \|c Dec. 1989 \|a Burlington : \|b William Andrew, Inc. \|a Saint Louis : \|b Elsevier Science & Technology Books [distributor]
300			\|a 1 online zdroj (456 p.) \|b ill.
521			\|a Scholarly & Professional \|b William Andrew, Incorporated.
504			\|a Includes bibliographies and index.
590			\|a Knovel Library \|b ACADEMIC - Electronics & Semiconductors
506			\|a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity
650		0	\|a Ion implantation.
650		0	\|a Ion bombardment \|x Industrial applications.
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700	1		\|a Rossnagel, Stephen M., \|e Editor. \|4 edt
700	1		\|a Kaufman, Harold R., \|e Author \|e Editor. \|4 edt
700	1		\|a Haber, Stephen M., \|e Author \|e Editor. \|4 edt
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