Fabrication of GaAs devices

This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...

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Bibliographic Details
Main Author Baca, A. G.
Corporate Author Institution of Electrical Engineers
Other Authors Ashby, Carol Iris Hill, 1953-
Format Electronic eBook
LanguageEnglish
Published London : Institution of Electrical Engineers, ©2005.
SeriesEMIS processing series ; no. 6.
Subjects
Gallium arsenide semiconductors.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781849190688
Physical Description1 online zdroj (xvii, 350 pages) : illustrations.

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Table of Contents:
  • Acknowledgment; Abbreviations; 1. Introduction to GaAs devices; 2. Semiconductor properties, growth, characterisation and processing techniques; 3. Cleaning and passivation of GaAs and related alloys; 4. Wet etching and photolithography of GaAs and related alloys; 5. Dry etching of GaAs and related alloys; 6. Ohmic contacts; 7. Schottky contacts; 8. Field effect transistors; 9. Heterojunction bipolar transistors; 10. Wet oxidation for optoelectronic and MIS GaAs devices; Glossary; Index.

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