Fabrication of GaAs devices
This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...
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| Main Author | |
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| Corporate Author | |
| Other Authors | |
| Format | Electronic eBook |
| Language | English |
| Published |
London :
Institution of Electrical Engineers,
©2005.
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| Series | EMIS processing series ;
no. 6. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781849190688 |
| Physical Description | 1 online zdroj (xvii, 350 pages) : illustrations. |
Cover
| Summary: | This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781849190688 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity |
| Physical Description: | 1 online zdroj (xvii, 350 pages) : illustrations. |