Fabrication of GaAs devices

This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Tr...

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Bibliographic Details
Main Author: Baca, A. G.
Corporate Author: Institution of Electrical Engineers.
Other Authors: Ashby, Carol Iris Hill, 1953-
Format: eBook
Language: English
Published: London : Institution of Electrical Engineers, ©2005.
Series: EMIS processing series ; no. 6.
Subjects:
Gallium arsenide semiconductors.
elektronické knihy
electronic books
ISBN: 9781849190688
Physical Description: 1 online zdroj (xvii, 350 pages) : illustrations.

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Summary: This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices.
Bibliography: Includes bibliographical references and index.
ISBN: 9781849190688
Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity

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