Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes

• Main Author: Bao, Min-Hang.
• Format: eBook
• Language: English
• Published: Amsterdam ; New York : Elsevier, 2000.
• Series: Handbook of sensors and actuators ; v. 8.
• Subjects: Transducers > Handbooks, manuals, etc.; Microelectromechanical systems > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 9780444505583; 9780080524030
• Physical Description: 1 online zdroj (xiv, 378 pages) : illustrations : digital, HTML and PDF files.

Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...