Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics

• Main Author: Williams, Michael E.
• Other Authors: Baldwin, David G., Manz, Paul C.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J., U.S.A. : Noyes Publications, c1995.
• Subjects: Semiconductor industry > Employees > Health and hygiene.; Industrial hygiene.; elektronické knihy; electronic books
• ISBN: 9781591241447; 9780815513698
• Physical Description: 1 online zdroj (xv, 348 p.) : ill.

This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...

Table of Contents:

• Introduction
• Industrial Hygiene Monitoring
• Industrial Hygiene Monitoring: Physical Agents
• Ventilation
• Personal Protective Equipment (PPE)
• Indoor Air Quality (IAQ)
• Ergonomics
• Industrial Hygiene Recordkeeping
• Plan Review
• Appendix A: Silicon Ingot and Wafer Manufacturing
• Appendix B: Silicon Device Manufacturing Introduction
• Appendix C: III-V (GaAs)
• Appendix D: III-V Device: Microwave IC
• Appendix E: Ion Implanter Maintenance Safety Considerations
• Appendix F: Bibliography
• Glossary and Acronyms
• Index.