Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration (ULSI)
A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.
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Other Authors: | |
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Format: | eBook |
Language: | English |
Published: |
Park Ridge, N.J. :
Noyes Publicatons,
c1988.
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Series: | Materials science and process technology series.
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Subjects: | |
ISBN: | 9781591242529 9780815518969 9780815511502 |
Physical Description: | 1 online zdroj (xiii, 675 p.) : ill. |
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