Handbook of semiconductor wafer cleaning technology science, technology, and applications
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
c1993.
|
| Series | Materials science and process technology series. Electronic materials and process technology.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781591240938 9780815513315 |
| Physical Description | 1 online zdroj (xx, 623 p.) : ill. |
Cover
Table of Contents:
- 12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett
- 13. Future Directions / Werner Kern.