Handbook of semiconductor wafer cleaning technology science, technology, and applications
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
c1993.
|
| Series | Materials science and process technology series. Electronic materials and process technology.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781591240938 9780815513315 |
| Physical Description | 1 online zdroj (xx, 623 p.) : ill. |
Cover
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| 245 | 0 | 0 | |a Handbook of semiconductor wafer cleaning technology |h [elektronický zdroj] : |b science, technology, and applications / |c edited by Werner Kern. |
| 260 | |a Park Ridge, N.J., U.S.A. : |b Noyes Publications, |c c1993. | ||
| 300 | |a 1 online zdroj (xx, 623 p.) : |b ill. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a počítač |b c |2 rdamedia | ||
| 338 | |a online zdroj |b cr |2 rdacarrier | ||
| 490 | 1 | |a Materials science and process technology series. Electronic materials and process technology | |
| 520 | |a Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a 12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett -- 13. Future Directions / Werner Kern. | |
| 590 | |a Knovel Library |b ACADEMIC - Electronics & Semiconductors | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity | ||
| 650 | 0 | |a Semiconductor wafers |x Cleaning. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Kern, Werner, |d 1925- | |
| 776 | 0 | 8 | |i Print version: |t Handbook of semiconductor wafer cleaning technology. |d Park Ridge, N.J., U.S.A. : Noyes Publications, c1993 |z 0815513313 |w (DLC) 93004078 |w (OCoLC)27976222 |
| 830 | 0 | |a Materials science and process technology series. |p Electronic materials and process technology. | |
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