Handbook of semiconductor wafer cleaning technology science, technology, and applications

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.

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Bibliographic Details
Other Authors: Kern, Werner, 1925-
Format: eBook
Language: English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, c1993.
Series: Materials science and process technology series. Electronic materials and process technology.
Subjects:
Semiconductor wafers > Cleaning.
elektronické knihy
electronic books
ISBN: 9781591240938
9780815513315
Physical Description: 1 online zdroj (xx, 623 p.) : ill.

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Description
Summary: Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
Bibliography: Includes bibliographical references and index.
ISBN: 9781591240938
9780815513315
Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity

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