Handbook of physical vapor deposition (PVD) processing

• Main Author: Mattox, D. M.
• Format: eBook
• Language: English
• Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], c2010.
• Edition: 2nd ed.
• Subjects: Physical vapor deposition > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 9780815520382
• Physical Description: 1 online zdroj.

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the ne...