Chemical vapour deposition precursors, processes and applications

• Other Authors: Jones, Anthony C., Hitchman, Michael L.
• Format: eBook
• Language: English
• Published: Cambridge, UK : Royal Society of Chemistry, c2009.
• Subjects: Chemical vapor deposition.; elektronické knihy; electronic books
• ISBN: 9781847558794; 9781621987031
• Physical Description: 1 online zdroj (xv, 582 p.) : ill., plans.