Lecture notes on principles of plasma processing
Saved in:
| Main Authors | , |
|---|---|
| Format | Book |
| Language | English |
| Published |
New York :
Kluwer Academic/Plenum Publishers,
c2003
|
| Subjects | |
| ISBN | 0306474972 978-0-306-47497-2 |
| Physical Description | ix, 208 s. : il. ; 28 cm + 1 CD-ROM |
Cover
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| 100 | 1 | |a Chen, Francis F., |d 1929- |7 xx0015793 |4 aut | |
| 245 | 1 | 0 | |a Lecture notes on principles of plasma processing / |c Francis F. Chen and Jane P. Chang |
| 260 | |a New York : |b Kluwer Academic/Plenum Publishers, |c c2003 | ||
| 300 | |a ix, 208 s. : |b il. ; |c 28 cm + |e 1 CD-ROM | ||
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