Lecture notes on principles of plasma processing

• Main Authors: Chen, Francis F., 1929- (Author), Chang, Jane P., 1970- (Author)
• Format: Book
• Language: English
• Published: New York : Kluwer Academic/Plenum Publishers, c2003
• Subjects: plazma (fyzika); fyzika plazmatu; chemie plazmatu; plasma (ionized gases); plasma physics; plasma chemistry; učebnice vysokých škol; textbooks (higher)
• ISBN: 0306474972; 978-0-306-47497-2
• Physical Description: ix, 208 s. : il. ; 28 cm + 1 CD-ROM
• Item Description: Dotisk bez CD