Fundamentals of microfabrication and nanotechnology

• Main Author: Madou, Marc J., 1953- (Author)
• Format: Book
• Language: English
• Published: Boca Raton : CRC Press, c2012
• Edition: 3rd ed.
• Subjects: mikrotechnologie; nanotechnologie; mikroelektronika; mikroelektromechanické systémy; nanomateriály; microtechnology; nanotechnology; microelectronics; microelectromechanical systems; nanostructure materials; příručky; handbooks, manuals, etc
• ISBN: 9780849331800; 978-1-4200-5511-5; 978-1-4200-5519-1; 978-1-4200-5516-0
• Physical Description: 3 sv. : il. (převáž. barev.), 29 cm

Table of Contents:

• sv. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology. xiii, 641 s.
• sv. 2. Manufacturing techniques for microfabrication and nanotechnology. xiii, 656 s.
• sv. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications. xiii, 636 s.