Staff View: Introduction to microfabrication

Introduction to microfabrication

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Bibliographic Details
Main Author:	Franssila, Sami (Author)
Format:	Book
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010
Edition:	2nd ed.
Subjects:	mikrotechnologie mikroelektronika MEMS (elektronika) mikrofluidika microtechnology microelectronics MEMS (electronics) microfluidics monografie monographs
ISBN:	9780470749838
Physical Description:	xi, 518 s. : il. ; 25 cm


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