Introduction to microfabrication

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Bibliographic Details
Main Author Franssila, Sami (Author)
Format Book
LanguageEnglish
Published Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010
Edition2nd ed.
Subjects
mikrotechnologie
mikroelektronika
MEMS (elektronika)
mikrofluidika
microtechnology
microelectronics
MEMS (electronics)
microfluidics
monografie
monographs
ISBN9780470749838
Physical Descriptionxi, 518 s. : il. ; 25 cm

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Bibliography:Obsahuje bibliografie a rejstřík
ISBN:9780470749838
Physical Description:xi, 518 s. : il. ; 25 cm

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