Introduction to microfabrication

• Main Author: Franssila, Sami (Author)
• Format: Book
• Language: English
• Published: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010
• Edition: 2nd ed.
• Subjects: mikrotechnologie; mikroelektronika; MEMS (elektronika); mikrofluidika; microtechnology; microelectronics; MEMS (electronics); microfluidics; monografie; monographs
• ISBN: 9780470749838
• Physical Description: xi, 518 s. : il. ; 25 cm