Handbook of silicon semiconductor metrology
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| Other Authors | |
|---|---|
| Format | Book |
| Language | English |
| Published |
New York :
Marcel Dekker,
c2001
|
| Subjects | |
| ISBN | 0824705068 |
| Physical Description | xvi, 874 s. : il. |
Cover
Glossary of Terms
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| Status | More Information | Location | Call Number | |
|---|---|---|---|---|
| Status Long term loan – Due: 31.12.2099 | More Information | Location FAI | Call Number 621.31/HANDBOOK |