Plasma nanoscience basic concepts and applications of deterministic nanofabrication

• Main Author: Ostrikov, K. (Author)
• Format: eBook
• Language: English
• Published: Weinheim : Wiley-VCH, c2008
• Subjects: nanotechnologie; plazma (fyzika); fyzika plazmatu; nanotechnology; plasma (ionized gases); plasma physics; elektronické knihy; electronic books
• ISBN: 3527407405; 978-3-527-62332-7; 978-3-527-40740-8
• Physical Description: xxv, 538 s. : il.