DISTURBANCE COMPENSATION FOR CHARGED PARTICLE BEAM DEVICES
Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the disturbances, e.g., while executing a manipulation mode for repairing defects on a lithography mask. Des dispositifs à faisceau de particules chargées,...
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| Main Authors | , , , , , , , |
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| Format | Patent |
| Language | English French |
| Published |
04.04.2024
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the disturbances, e.g., while executing a manipulation mode for repairing defects on a lithography mask.
Des dispositifs à faisceau de particules chargées, par exemple, pour des tâches de réparation, sont soumis à des perturbations. Une sortie de capteur d'un ou de plusieurs capteurs est utilisée pour compenser les perturbations, par exemple, tout en exécutant un mode de manipulation pour réparer des défauts sur un masque de lithographie. |
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| AbstractList | Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the disturbances, e.g., while executing a manipulation mode for repairing defects on a lithography mask.
Des dispositifs à faisceau de particules chargées, par exemple, pour des tâches de réparation, sont soumis à des perturbations. Une sortie de capteur d'un ou de plusieurs capteurs est utilisée pour compenser les perturbations, par exemple, tout en exécutant un mode de manipulation pour réparer des défauts sur un masque de lithographie. |
| Author | SCHWARZ, Daniel BALLING, Steffen HARMSEN, Lucas SCHINDLER, Bernd GNEDEL, Maximilian EMMRICH, Daniel Alexander KLAMANDT, Samuel HAEBERLEN, Maik |
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| DocumentTitleAlternate | COMPENSATION DE PERTURBATION POUR DISPOSITIFS À FAISCEAU DE PARTICULES CHARGÉES |
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| RelatedCompanies | CARL ZEISS MICROSCOPY GMBH CARL ZEISS MULTISEM GMBH |
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| Snippet | Charged particle beam devices, e.g., for repair tasks, are subject to disturbances. A sensor output of one or more sensors is used to compensate the... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | DISTURBANCE COMPENSATION FOR CHARGED PARTICLE BEAM DEVICES |
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