ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY
A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a...
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| Main Authors | , , |
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| Format | Patent |
| Language | English French German |
| Published |
30.04.2025
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. |
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| AbstractList | A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. |
| Author | GERLING, John PLETTNER, Tomas NASSER-GHODSI, Mehran |
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| DocumentTitleAlternate | DESIGN EINES ASYMMETRISCHEN DETEKTORS UND METHODOLOGIE MÉTHODOLOGIE ET CONCEPTION DE DÉTECTEUR ASYMÉTRIQUE |
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| RelatedCompanies | KLA - Tencor Corporation |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY |
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