大面积单离子注入沟槽台面型锗光电探测器的研制

采用电阻率ρ=0.35Ω-cm和6Ω-cm的掺Sb的N型Ge单晶作衬底材料,并分别注入B+、Be+形成P+区的方法,制作了两种光敏面为φ1.6mm台面型Ge-PD.光电性能测试表明,在近零偏压应用时,光谱响应与注入离子种类和电阻率无关,而Ⅰ—Ⅴ特性、响应度R?却与材料电阻率、结深和注入离子种类有关。...

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Published inGuangtongxin Yanjiu pp. 32 - 40
Main Author 丁国庆
Format Journal Article
LanguageChinese
Published 《光通信研究》编辑部 01.01.1988
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ISSN1005-8788

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Abstract 采用电阻率ρ=0.35Ω-cm和6Ω-cm的掺Sb的N型Ge单晶作衬底材料,并分别注入B+、Be+形成P+区的方法,制作了两种光敏面为φ1.6mm台面型Ge-PD.光电性能测试表明,在近零偏压应用时,光谱响应与注入离子种类和电阻率无关,而Ⅰ—Ⅴ特性、响应度R?却与材料电阻率、结深和注入离子种类有关。
AbstractList 采用电阻率ρ=0.35Ω-cm和6Ω-cm的掺Sb的N型Ge单晶作衬底材料,并分别注入B+、Be+形成P+区的方法,制作了两种光敏面为φ1.6mm台面型Ge-PD.光电性能测试表明,在近零偏压应用时,光谱响应与注入离子种类和电阻率无关,而Ⅰ—Ⅴ特性、响应度R?却与材料电阻率、结深和注入离子种类有关。
Author 丁国庆
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Snippet 采用电阻率ρ=0.35Ω-cm和6Ω-cm的掺Sb的N型Ge单晶作衬底材料,并分别注入B+、Be+形成P+区的方法,制作了两种光敏面为φ1.6mm台面型Ge-PD.光电性能测试表明,在近零偏压应用时,光谱响应与注入离子种类和电阻率无关,而Ⅰ—Ⅴ特性、响应度R?却与材料电阻率、结深和注入离子种类有关。
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StartPage 32
Title 大面积单离子注入沟槽台面型锗光电探测器的研制
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