Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems) - Han, Youngshin; Park, Dongsik; Chae, Sangwon; Lee, Chilgee (Systems Modeling and Simulation: Theory and Applications, 2005)
Keywords: Automate Material Handling System; Average Cycle Time; Delivery Time; Dynamic Factory Modeling; Semiconductor Company