4H-SiC半导体同质外延生长技术进展

TN304%TQ163; 4H-SiC(碳化硅)半导体是制作高温、高频、大功率电力电子器件的理想电子材料,近20年来材料生长技术水平不断提升,材料品质逐步提高.本文首先介绍了4H-SiC半导体同质外延生长的必要性,结合SiC多晶型的结构特点,介绍了4H-SiC外延生长过程中的原位掺杂浓度控制、扩展缺陷控制、点缺陷控制及高速生长控制方面的技术进展.同时,介绍了国产4H-SiC外延产业化的现状....

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Published in人工晶体学报 Vol. 49; no. 11; pp. 2128 - 2138
Main Authors 冯淦, 孙永强, 钱卫宁, 陈志霞
Format Journal Article
LanguageChinese
Published 瀚天天成电子科技(厦门)有限公司,厦门 361101 01.11.2020
Subjects
化学气相沉积
外延生长
4H-SiC
宽禁带半导体
Online AccessGet full text
ISSN1000-985X

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Abstract TN304%TQ163; 4H-SiC(碳化硅)半导体是制作高温、高频、大功率电力电子器件的理想电子材料,近20年来材料生长技术水平不断提升,材料品质逐步提高.本文首先介绍了4H-SiC半导体同质外延生长的必要性,结合SiC多晶型的结构特点,介绍了4H-SiC外延生长过程中的原位掺杂浓度控制、扩展缺陷控制、点缺陷控制及高速生长控制方面的技术进展.同时,介绍了国产4H-SiC外延产业化的现状.
AbstractList TN304%TQ163; 4H-SiC(碳化硅)半导体是制作高温、高频、大功率电力电子器件的理想电子材料,近20年来材料生长技术水平不断提升,材料品质逐步提高.本文首先介绍了4H-SiC半导体同质外延生长的必要性,结合SiC多晶型的结构特点,介绍了4H-SiC外延生长过程中的原位掺杂浓度控制、扩展缺陷控制、点缺陷控制及高速生长控制方面的技术进展.同时,介绍了国产4H-SiC外延产业化的现状.
Author 冯淦
孙永强
钱卫宁
陈志霞
AuthorAffiliation 瀚天天成电子科技(厦门)有限公司,厦门 361101
AuthorAffiliation_xml – name: 瀚天天成电子科技(厦门)有限公司,厦门 361101
Author_FL QIAN Weining
CHEN Zhixia
SUN Yongqiang
FENG Gan
Author_FL_xml – sequence: 1
  fullname: FENG Gan
– sequence: 2
  fullname: SUN Yongqiang
– sequence: 3
  fullname: QIAN Weining
– sequence: 4
  fullname: CHEN Zhixia
Author_xml – sequence: 1
  fullname: 冯淦
– sequence: 2
  fullname: 孙永强
– sequence: 3
  fullname: 钱卫宁
– sequence: 4
  fullname: 陈志霞
BookMark eNrjYmDJy89LZWHgNDQwMNC1tDCN4GDgLS7OTAJyLcyMDCwsOBl0TTx0gzOdn_Z2PV2_58neyU8n9LzYsuLpkmlPd297PmX-y6n7n3U1PJuz_sX-2U83TuVhYE1LzClO5YXS3Awhbq4hzh66Pv7uns6OPrrFhgYmJrrmqZZmyQYp5qapqUmmhubJScYmFhbJiWkGpqZpxoapZoZGKYbmiaZmFpZGqZYpSeYWaWbGlsZpxokpJhamQJqbQRNibHliXlpiXnp8Vn5pUR7Qwvii9KySiiRLCyMDIwNDQwNDE2MAIyBORw
ClassificationCodes TN304%TQ163
ContentType Journal Article
Copyright Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
Copyright_xml – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
DBID 2B.
4A8
92I
93N
PSX
TCJ
DatabaseName Wanfang Data Journals - Hong Kong
WANFANG Data Centre
Wanfang Data Journals
万方数据期刊 - 香港版
China Online Journals (COJ)
China Online Journals (COJ)
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
DocumentTitle_FL Progress in Homoepitaxial Growth of 4H-SiC Semiconductor
EndPage 2138
ExternalDocumentID rgjtxb98202011014
GrantInformation_xml – fundername: 国家重点研发计划
  funderid: (2016YFB0400403)
GroupedDBID -01
2B.
4A8
5XA
5XB
5XC
92E
92I
93N
ABDBF
ABJNI
ACGFS
ACUHS
ALMA_UNASSIGNED_HOLDINGS
CCEZO
CCVFK
CW9
PSX
TCJ
TGP
U1G
U5K
U5L
ID FETCH-LOGICAL-s1044-7e96c0d75eeb517cb3488caf055f31e612d17a56892e9db78f6393f3ad4853f3
ISSN 1000-985X
IngestDate Thu May 29 04:04:24 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 11
Keywords 化学气相沉积
外延生长
4H-SiC
宽禁带半导体
Language Chinese
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-s1044-7e96c0d75eeb517cb3488caf055f31e612d17a56892e9db78f6393f3ad4853f3
PageCount 11
ParticipantIDs wanfang_journals_rgjtxb98202011014
PublicationCentury 2000
PublicationDate 2020-11-01
PublicationDateYYYYMMDD 2020-11-01
PublicationDate_xml – month: 11
  year: 2020
  text: 2020-11-01
  day: 01
PublicationDecade 2020
PublicationTitle 人工晶体学报
PublicationTitle_FL Journal of Synthetic Crystals
PublicationYear 2020
Publisher 瀚天天成电子科技(厦门)有限公司,厦门 361101
Publisher_xml – name: 瀚天天成电子科技(厦门)有限公司,厦门 361101
SSID ssib000862088
ssib023167813
ssib051369607
ssj0000547349
Score 2.2760136
SecondaryResourceType review_article
Snippet TN304%TQ163; 4H-SiC(碳化硅)半导体是制作高温、高频、大功率电力电子器件的理想电子材料,近20年来材料生长技术水平不断提升,材料品质逐步提高.本文首先介绍了4H-SiC半导体...
SourceID wanfang
SourceType Aggregation Database
StartPage 2128
Title 4H-SiC半导体同质外延生长技术进展
URI https://d.wanfangdata.com.cn/periodical/rgjtxb98202011014
Volume 49
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVEBS
  databaseName: EBSCOhost Academic Search Ultimate
  issn: 1000-985X
  databaseCode: ABDBF
  dateStart: 20201001
  customDbUrl: https://search.ebscohost.com/login.aspx?authtype=ip,shib&custid=s3936755&profile=ehost&defaultdb=asn
  isFulltext: true
  dateEnd: 99991231
  titleUrlDefault: https://search.ebscohost.com/direct.asp?db=asn
  omitProxy: true
  ssIdentifier: ssj0000547349
  providerName: EBSCOhost
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR1Ni9QwNOyMFz2In_jNIuYklSZt0jzwks60DB68OMLcln6uehhhdxZkT54XBUHXi4IXD94WQbyo7J-x6_ovfEk70w7rYRWG8uYl7-V9NM1LSF4IuSVVAqWSwklFzh2_xC6lskI6SVaH_wCFzfZ5X44e-vcmYrLSu9vZtbQ1S-9k2389V_I_XkUc-tWckv0Hzy6YIgJh9C8-0cP4PJaP_ZHz4PGARoKqIVXaADqmIWJ8Gg4peAYDLlWIUTT0qVa2jk9BGiAMaYhAQAExMY2AAiIRkIabcg0AA8PTkMcUQkvFaH1j5Tyotc1p8zOlAdXCEoJl3pFED6mWDXMt5q624kvbiLTUsluCNMjIlLg0tNKjeu3igpWZG5FqI2groY6oYktVgKqaGJUILGZAIeoueeD8li0teRi7mG0gujGZhg4gDT-0bG27UMxFtRiNSNYakduWVWSVB9M-uoFDY1wFjYCGFqshn9qjsdGXD47S3vYkRlOsM5yYc_ugxKQ73tQpWuf9ii2NHs1B-aL566l2mF5sntxYfzJ7loIyljHN-T3S8xjvkxM6HIbx0mTVbZPRcZPzQLXBm2DmKsdm8l9nwvcDz84XF2Lbk2zTMpmud4Ku8Rlyupktrer61T9LVrYfnSOnOjk0zxOn7gTVy51q7_vPH6-rVy8Ov3yqPr6tvn399ebD7939g53nB-_3DvffVZ93L5BxHI0HI6e5A8TZxC-F7wQFyMzNA1EUqWBBlno44mRJ6QpReqzA-DxnQSKkAl5AngaqxJDbK70k9zEQLb2LpD99Oi0ukVXIGJdJHmQS-aYlV0r5OYaIPCu5m3N-mdxsdF1ruvjm2hFTXzlOpavkZPvWXiP92cZWcR1D11l6o_HRH0O1anM
linkProvider EBSCOhost
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=4H-SiC%E5%8D%8A%E5%AF%BC%E4%BD%93%E5%90%8C%E8%B4%A8%E5%A4%96%E5%BB%B6%E7%94%9F%E9%95%BF%E6%8A%80%E6%9C%AF%E8%BF%9B%E5%B1%95&rft.jtitle=%E4%BA%BA%E5%B7%A5%E6%99%B6%E4%BD%93%E5%AD%A6%E6%8A%A5&rft.au=%E5%86%AF%E6%B7%A6&rft.au=%E5%AD%99%E6%B0%B8%E5%BC%BA&rft.au=%E9%92%B1%E5%8D%AB%E5%AE%81&rft.au=%E9%99%88%E5%BF%97%E9%9C%9E&rft.date=2020-11-01&rft.pub=%E7%80%9A%E5%A4%A9%E5%A4%A9%E6%88%90%E7%94%B5%E5%AD%90%E7%A7%91%E6%8A%80%28%E5%8E%A6%E9%97%A8%29%E6%9C%89%E9%99%90%E5%85%AC%E5%8F%B8%2C%E5%8E%A6%E9%97%A8+361101&rft.issn=1000-985X&rft.volume=49&rft.issue=11&rft.spage=2128&rft.epage=2138&rft.externalDocID=rgjtxb98202011014
thumbnail_s http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Frgjtxb98%2Frgjtxb98.jpg