激光制备高附着性能的铜基类金刚石膜

TH145.1; 提升类金刚石(Diamond-Like Carbon,DLC)膜在被保护基底上的附着能力具有明显的实际应用价值.从微观机理上分析了前期设计的Cu基多层DLC膜有效性的原因.在此基础上,研究了DLC/SiC循环层中两者厚度比例对膜层的附着性能、纳米硬度和耐磨性的影响,以优化结构、进一步提升实际应用所需的膜层性能.纳米划痕和压痕测试结果表明:随着DLC层与SiC层厚度比例的增大,多层DLC膜在Cu基上附着性能逐渐降低,但当厚度比小于2.3时,仍接近厚度400 nm的单层DLC膜在Si基上的附着性能;Cu基多层DLC膜的纳米硬度逐渐提高,同时,耐磨性接近纯DLC膜....

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Published in国防科技大学学报 Vol. 42; no. 5; pp. 68 - 73
Main Authors 陆益敏, 黄国俊, 米朝伟, 奚琳, 王赛, 曹海源, 程勇
Format Journal Article
LanguageChinese
Published 陆军工程大学军械士官学校,湖北武汉 430075%安徽工程大学机械与汽车工程学院,安徽芜湖 241000 28.10.2020
Subjects
纳米硬度
耐磨性
脉冲激光沉积
临界载荷
铜基类金刚石膜
Online AccessGet full text
ISSN1001-2486
DOI10.11887/j.cn.202005010

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Abstract TH145.1; 提升类金刚石(Diamond-Like Carbon,DLC)膜在被保护基底上的附着能力具有明显的实际应用价值.从微观机理上分析了前期设计的Cu基多层DLC膜有效性的原因.在此基础上,研究了DLC/SiC循环层中两者厚度比例对膜层的附着性能、纳米硬度和耐磨性的影响,以优化结构、进一步提升实际应用所需的膜层性能.纳米划痕和压痕测试结果表明:随着DLC层与SiC层厚度比例的增大,多层DLC膜在Cu基上附着性能逐渐降低,但当厚度比小于2.3时,仍接近厚度400 nm的单层DLC膜在Si基上的附着性能;Cu基多层DLC膜的纳米硬度逐渐提高,同时,耐磨性接近纯DLC膜.
AbstractList TH145.1; 提升类金刚石(Diamond-Like Carbon,DLC)膜在被保护基底上的附着能力具有明显的实际应用价值.从微观机理上分析了前期设计的Cu基多层DLC膜有效性的原因.在此基础上,研究了DLC/SiC循环层中两者厚度比例对膜层的附着性能、纳米硬度和耐磨性的影响,以优化结构、进一步提升实际应用所需的膜层性能.纳米划痕和压痕测试结果表明:随着DLC层与SiC层厚度比例的增大,多层DLC膜在Cu基上附着性能逐渐降低,但当厚度比小于2.3时,仍接近厚度400 nm的单层DLC膜在Si基上的附着性能;Cu基多层DLC膜的纳米硬度逐渐提高,同时,耐磨性接近纯DLC膜.
Author 奚琳
曹海源
程勇
陆益敏
米朝伟
王赛
黄国俊
AuthorAffiliation 陆军工程大学军械士官学校,湖北武汉 430075%安徽工程大学机械与汽车工程学院,安徽芜湖 241000
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Author_FL MI Chaowei
CAO Haiyuan
CHENG Yong
WANG Sai
LU Yimin
HUANG Guojun
XI Lin
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DocumentTitle_FL Cu-based diamond-like carbon film with high adhesion prepared by pulsed laser deposition
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Keywords 纳米硬度
耐磨性
脉冲激光沉积
临界载荷
铜基类金刚石膜
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Snippet TH145.1; 提升类金刚石(Diamond-Like Carbon,DLC)膜在被保护基底上的附着能力具有明显的实际应用价值.从微观机理上分析了前期设计的Cu基多层DLC膜有效性的原因.在此基础...
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StartPage 68
Title 激光制备高附着性能的铜基类金刚石膜
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