电感耦合等离子体放电特性的三维仿真研究
TJ760.1%V211.1; 针对电感耦合等离子体(ICP)的放电问题,设计了一种闭式透波腔体构型,建立了ICP的流体力学模型,并利用多物理场仿真平台COMSOL进行三维仿真研究.分析了放电过程中电子密度、电子温度和等离子体电势等典型参数随时间的变化规律,在此基础上改变射频电源的功率、腔体内气压等条件,获得ICP的参数范围以及空间梯度分布.结果表明,放电功率主要影响等离子体参数的数值范围,而气压的改变则对等离子体参数的数值和空间分布都会产生影响.当射频电源功率从100 W增加到300 W时,电子密度峰值从2.54×1017 m-3增加到5.68×1017 m-3,同时反应稳定后加热区感应出的...
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| Published in | 航空兵器 Vol. 29; no. 3; pp. 82 - 87 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | Chinese |
| Published |
空军工程大学,西安 710038%中国人民解放军93131部队,北京 100038
30.06.2022
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1673-5048 |
| DOI | 10.12132/ISSN.1673-5048.2021.0228 |
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| Abstract | TJ760.1%V211.1; 针对电感耦合等离子体(ICP)的放电问题,设计了一种闭式透波腔体构型,建立了ICP的流体力学模型,并利用多物理场仿真平台COMSOL进行三维仿真研究.分析了放电过程中电子密度、电子温度和等离子体电势等典型参数随时间的变化规律,在此基础上改变射频电源的功率、腔体内气压等条件,获得ICP的参数范围以及空间梯度分布.结果表明,放电功率主要影响等离子体参数的数值范围,而气压的改变则对等离子体参数的数值和空间分布都会产生影响.当射频电源功率从100 W增加到300 W时,电子密度峰值从2.54×1017 m-3增加到5.68×1017 m-3,同时反应稳定后加热区感应出的电势和相应的电子温度呈现小幅降低;腔内气压在一定范围内升高会使得电子密度明显增加,气压从10 Pa增加到30 Pa,电子密度从9.12×1017 m-3上升到3.62×1018 m-3,但气压过高会导致等离子体参数分布的均匀性变差. |
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| AbstractList | TJ760.1%V211.1; 针对电感耦合等离子体(ICP)的放电问题,设计了一种闭式透波腔体构型,建立了ICP的流体力学模型,并利用多物理场仿真平台COMSOL进行三维仿真研究.分析了放电过程中电子密度、电子温度和等离子体电势等典型参数随时间的变化规律,在此基础上改变射频电源的功率、腔体内气压等条件,获得ICP的参数范围以及空间梯度分布.结果表明,放电功率主要影响等离子体参数的数值范围,而气压的改变则对等离子体参数的数值和空间分布都会产生影响.当射频电源功率从100 W增加到300 W时,电子密度峰值从2.54×1017 m-3增加到5.68×1017 m-3,同时反应稳定后加热区感应出的电势和相应的电子温度呈现小幅降低;腔内气压在一定范围内升高会使得电子密度明显增加,气压从10 Pa增加到30 Pa,电子密度从9.12×1017 m-3上升到3.62×1018 m-3,但气压过高会导致等离子体参数分布的均匀性变差. |
| Author | 李颖晖 郭旭 王瑶东 常怡鹏 邱辰霖 |
| AuthorAffiliation | 空军工程大学,西安 710038%中国人民解放军93131部队,北京 100038 |
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| Author_FL | Wang Yaodong Li Yinghui Qiu Chenlin Guo Xu Chang Yipeng |
| Author_FL_xml | – sequence: 1 fullname: Guo Xu – sequence: 2 fullname: Li Yinghui – sequence: 3 fullname: Qiu Chenlin – sequence: 4 fullname: Chang Yipeng – sequence: 5 fullname: Wang Yaodong |
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| Keywords | 感应耦合等离子体 流体力学 飞行器 隐身 有限元方法 雷达回波 放电特性 |
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| Title | 电感耦合等离子体放电特性的三维仿真研究 |
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