微金字塔阵列结构的飞刀切削技术研究

微结构阵列光学元件的加工受到越来越广泛的关注，单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势，逐渐应用于微结构的加工。本文主要研究飞刀切削微金字塔结构时，机床重复定位误差和循环加工引入的误差对微结构切削效果的影响，分析V槽切削时次沟槽产生的条件，研究抑制次沟槽产生方法，实验验证了可以通过控制切削深度大于最小切削深度来抑制次沟槽的产生。...

Full description

Saved in:
Bibliographic Details
Published inGuang Dian Gong Cheng = Opto-Electronic Engineering Vol. 47; no. 8; pp. 190179 - 110
Main Authors 杜丹, 黄岳田, 范斌 / Du Dan, Huang Yuetian, Fan, Bin
Format Journal Article
LanguageChinese
English
Published Chengdu Editorial Office of Opto-Electronic Advances 15.08.2020
北京跟踪与通信技术研究所,北京 100094%中国科学院光电技术研究所,四川 成都 610209
中国科学院大学,北京 100049%中国科学院光电技术研究所,四川 成都 610209
Subjects
Advanced manufacturing technologies
Arrays
Cutting
Diamond machining
Flying cutting
Ion beams
Machine tools
Microstructure
Optical components
Optics
Positioning devices (machinery)
Turning (machining)
China
次沟槽
微金字塔结构
切削深度
飞刀切削
Online AccessGet full text
ISSN1003-501X
DOI10.12086/oee.2020.190179

Cover

Abstract 微结构阵列光学元件的加工受到越来越广泛的关注，单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势，逐渐应用于微结构的加工。本文主要研究飞刀切削微金字塔结构时，机床重复定位误差和循环加工引入的误差对微结构切削效果的影响，分析V槽切削时次沟槽产生的条件，研究抑制次沟槽产生方法，实验验证了可以通过控制切削深度大于最小切削深度来抑制次沟槽的产生。
AbstractList TH74; 微结构阵列光学元件的加工受到越来越广泛的关注,单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势,逐渐应用于微结构的加工.本文主要研究飞刀切削微金字塔结构时,机床重复定位误差和循环加工引入的误差对微结构切削效果的影响,分析V槽切削时次沟槽产生的条件,研究抑制次沟槽产生方法,实验验证了可以通过控制切削深度大于最小切削深度来抑制次沟槽的产生.
微结构阵列光学元件的加工受到越来越广泛的关注，单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势，逐渐应用于微结构的加工。本文主要研究飞刀切削微金字塔结构时，机床重复定位误差和循环加工引入的误差对微结构切削效果的影响，分析V槽切削时次沟槽产生的条件，研究抑制次沟槽产生方法，实验验证了可以通过控制切削深度大于最小切削深度来抑制次沟槽的产生。
Author 杜丹
范斌 / Du Dan
黄岳田
Huang Yuetian
Fan, Bin
AuthorAffiliation 北京跟踪与通信技术研究所,北京 100094%中国科学院光电技术研究所,四川 成都 610209;中国科学院大学,北京 100049%中国科学院光电技术研究所,四川 成都 610209
AuthorAffiliation_xml – name: 北京跟踪与通信技术研究所,北京 100094%中国科学院光电技术研究所,四川 成都 610209;中国科学院大学,北京 100049%中国科学院光电技术研究所,四川 成都 610209
Author_FL Fan Bin
Huang Yuetian
Du Dan
Author_FL_xml – sequence: 1
  fullname: Du Dan
– sequence: 2
  fullname: Huang Yuetian
– sequence: 3
  fullname: Fan Bin
Author_xml – sequence: 1
  fullname: 杜丹
– sequence: 2
  fullname: 黄岳田
– sequence: 3
  fullname: 范斌 / Du Dan
– sequence: 4
  fullname: Huang Yuetian
– sequence: 5
  givenname: Bin
  surname: Fan
  fullname: Fan, Bin
BookMark eNpFj79Lw0AYhm-oYK3d3cUx9fu-Sy53oxR_QcFFwa1cmlxRJKmNxbVDobVbsVARKYqTgzrpIvjfXEP-CyMVnF5eeHhe3jVWipM4YmwDoYYEUmwnUVQjoKIqQF-VWBkBuOMBnq6yapqeBQAuKV8Kv8y4_X7LhxP7OrNP0_zuw45m2dftYj7I7gf589yO-nY0tDfjxbi_eHjPHqfZy-c6WzH6Io2qf1lhJ3u7x_UDp3G0f1jfaTgdJImOQhSGWoLAtIyUJpRgQlIYiABCLYALNFoRd4mk0Mp4GPjaE0J40igZBLzCtpbeax0bHbeb50mvGxeLzXbYbv1eBAmIBbe55Drd5LIXpVf_ILmu8l3uIvEf7e5juw
ClassificationCodes TH74
ContentType Journal Article
Copyright 2020. Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the associated terms available at http://www.oejournal.org/Item/Term.html
Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
Copyright_xml – notice: 2020. Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the associated terms available at http://www.oejournal.org/Item/Term.html
– notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
DBID 8FE
8FG
ABJCF
ABUWG
AFKRA
AZQEC
BENPR
BGLVJ
BVBZV
CCPQU
DWQXO
HCIFZ
L6V
M7S
PHGZM
PHGZT
PIMPY
PKEHL
PQEST
PQGLB
PQQKQ
PQUKI
PRINS
PTHSS
2B.
4A8
92I
93N
PSX
TCJ
DOI 10.12086/oee.2020.190179
DatabaseName ProQuest SciTech Collection
ProQuest Technology Collection
Materials Science & Engineering Collection
ProQuest Central (Alumni)
ProQuest Central UK/Ireland
ProQuest Central Essentials
ProQuest Central
ProQuest Technology Collection
East & South Asia Database
ProQuest One Community College
ProQuest Central
SciTech Premium Collection (Proquest)
ProQuest Engineering Collection
Engineering Database
ProQuest Central Premium
ProQuest One Academic
Publicly Available Content Database
ProQuest One Academic Middle East (New)
ProQuest One Academic Eastern Edition (DO NOT USE)
ProQuest One Applied & Life Sciences
ProQuest One Academic
ProQuest One Academic UKI Edition
ProQuest Central China
Engineering Collection
Wanfang Data Journals - Hong Kong
WANFANG Data Centre
Wanfang Data Journals
万方数据期刊 - 香港版
China Online Journals (COJ)
China Online Journals (COJ)
DatabaseTitle Publicly Available Content Database
Engineering Database
Technology Collection
ProQuest One Academic Middle East (New)
ProQuest Central Essentials
ProQuest One Academic Eastern Edition
ProQuest Central (Alumni Edition)
SciTech Premium Collection
ProQuest One Community College
ProQuest Technology Collection
ProQuest SciTech Collection
ProQuest Central China
East & South Asia Database
ProQuest Central
ProQuest One Applied & Life Sciences
ProQuest Engineering Collection
ProQuest One Academic UKI Edition
ProQuest Central Korea
Materials Science & Engineering Collection
ProQuest Central (New)
ProQuest One Academic
ProQuest One Academic (New)
Engineering Collection
DatabaseTitleList
Publicly Available Content Database
Database_xml – sequence: 1
  dbid: 8FG
  name: ProQuest Technology Collection
  url: https://search.proquest.com/technologycollection1
  sourceTypes: Aggregation Database
DeliveryMethod fulltext_linktorsrc
DocumentTitle_FL Research on flying cutting technology with micro pyramid array structure
EndPage 110
ExternalDocumentID gdgc202008011
GeographicLocations China
GeographicLocations_xml – name: China
GroupedDBID 8FE
8FG
ABJCF
ABUWG
AFKRA
ALMA_UNASSIGNED_HOLDINGS
AZQEC
BENPR
BGLVJ
BPHCQ
BVBZV
CCPQU
DWQXO
HCIFZ
L6V
M7S
PHGZM
PHGZT
PIMPY
PKEHL
PQEST
PQGLB
PQQKQ
PQUKI
PRINS
PROAC
PTHSS
2B.
4A8
92I
93N
PMFND
PSX
TCJ
ID FETCH-LOGICAL-p1281-9116f2c620fcf88fd80fd291b6b0da60361fa92342286a9f51b7a566658f98bb3
IEDL.DBID BENPR
ISSN 1003-501X
IngestDate Thu May 29 03:55:49 EDT 2025
Fri Jul 25 11:55:20 EDT 2025
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 8
Keywords 次沟槽
微金字塔结构
切削深度
飞刀切削
Language Chinese
English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-p1281-9116f2c620fcf88fd80fd291b6b0da60361fa92342286a9f51b7a566658f98bb3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
OpenAccessLink https://www.proquest.com/docview/2449743412?pq-origsite=%requestingapplication%&accountid=15518
PQID 2449743412
PQPubID 4393697
PageCount 7
ParticipantIDs wanfang_journals_gdgc202008011
proquest_journals_2449743412
PublicationCentury 2000
PublicationDate 2020-08-15
PublicationDateYYYYMMDD 2020-08-15
PublicationDate_xml – month: 08
  year: 2020
  text: 2020-08-15
  day: 15
PublicationDecade 2020
PublicationPlace Chengdu
PublicationPlace_xml – name: Chengdu
PublicationTitle Guang Dian Gong Cheng = Opto-Electronic Engineering
PublicationTitle_FL Opto-Electronic Engineering
PublicationYear 2020
Publisher Editorial Office of Opto-Electronic Advances
北京跟踪与通信技术研究所,北京 100094%中国科学院光电技术研究所,四川 成都 610209
中国科学院大学,北京 100049%中国科学院光电技术研究所,四川 成都 610209
Publisher_xml – name: Editorial Office of Opto-Electronic Advances
– name: 中国科学院大学,北京 100049%中国科学院光电技术研究所,四川 成都 610209
– name: 北京跟踪与通信技术研究所,北京 100094%中国科学院光电技术研究所,四川 成都 610209
SSID ssib004297867
ssib023646518
ssib036437391
ssib060517286
ssib023167165
ssj0002964646
ssib002258422
ssib001102639
ssib051369860
ssib000459782
Score 2.2803276
Snippet 微结构阵列光学元件的加工受到越来越广泛的关注，单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势，逐渐应用于微结构的加工。本文主要研究飞刀切削微金字塔结构...
TH74; 微结构阵列光学元件的加工受到越来越广泛的关注,单点金刚石飞刀切削技术以高效率低成本且加工精度高的优势,逐渐应用于微结构的加工.本文主要研究飞刀切削微金字塔结...
SourceID wanfang
proquest
SourceType Aggregation Database
StartPage 190179
SubjectTerms Advanced manufacturing technologies
Arrays
Cutting
Diamond machining
Flying cutting
Ion beams
Machine tools
Microstructure
Optical components
Optics
Positioning devices (machinery)
Turning (machining)
Title 微金字塔阵列结构的飞刀切削技术研究
URI https://www.proquest.com/docview/2449743412
https://d.wanfangdata.com.cn/periodical/gdgc202008011
Volume 47
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVPQU
  databaseName: East & South Asia Database
  issn: 1003-501X
  databaseCode: BVBZV
  dateStart: 20180101
  customDbUrl:
  isFulltext: true
  dateEnd: 20210131
  titleUrlDefault: https://search.proquest.com/eastsouthasia
  omitProxy: false
  ssIdentifier: ssj0002964646
  providerName: ProQuest
– providerCode: PRVPQU
  databaseName: ProQuest Central
  issn: 1003-501X
  databaseCode: BENPR
  dateStart: 20180101
  customDbUrl: http://www.proquest.com/pqcentral?accountid=15518
  isFulltext: true
  dateEnd: 20210131
  titleUrlDefault: https://www.proquest.com/central
  omitProxy: true
  ssIdentifier: ssj0002964646
  providerName: ProQuest
– providerCode: PRVPQU
  databaseName: ProQuest Technology Collection
  issn: 1003-501X
  databaseCode: 8FG
  dateStart: 20180101
  customDbUrl:
  isFulltext: true
  dateEnd: 99991231
  titleUrlDefault: https://search.proquest.com/technologycollection1
  omitProxy: true
  ssIdentifier: ssj0002964646
  providerName: ProQuest
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV2_S8NAFD5si-Aiioo_i4NrMHdJLpdBRMVaBIuIQje5y-Xq1FatCE4OgrWbWFBERHFyUCddBP-btPS_8F6bkrg4Jxnu8e57X-679z2EFrDEWGOvbRBLccPmLjU8EgSGb5rSYb4MrAAU3a0Cze_Zm0WnOIAK_V4YuFbZx8QuUMuKD2fki7oMaeqrMZcsVw8NmBoF6mp_hAaPRivIpa7FWAplCDhjpVFmdb2wvZMkMF7Sv10XP0ITvpg6u5mdMLTTaO2yuEAT6BvHsS4I7uvUidHdAhnMit1nHGxRj8U_IBQcsUhk2Aa1AkRP2muBgktijomLkZZKYAJSJQAnTwI9hbBz_rDgwVNeVrxcSpTD3Agajnjs_Eov8UbRwNnBGLLCn_fO5XX4dhs-Nzt3n2H9tv1903q8aN9fdF4ew_p5WL8Mrxqtxnnr4aP91Gy_fo2jvdz67lreiKYyGFVQ3QAdqSI-JabyFWNKMlNJ4mFBhSk51THAimvaCN5ilHvKwcLlmjRqqqM8JoQ1gdLlSjmYRPPcFVxyTYlMyWxPWoIRj4OOF-giKRx3Cs3217sfba3j_TgRplA2ikH8tCRLPkRME2GMp___fgYNwatwQoydWZSuHZ0Ec5pi1EQWpVhuIxtlzy_ieNAd
linkProvider ProQuest
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV3PTxQxFG4QYvRCNGpEAfegx4nTzkynPRCDClkENoZAsre1nbbraRcFQ_TEgYSVG5EEQgyBePKgnuBiwn8zu9n_gvegmxkv3jhPOplp34-v_fq-R8hTaiiF2BsHLHIqiFXKA8msDbIwNInIjI0sMrqLNV5did_Uk_oQOR_UwuC1ykFMvAzUpp3hGflzSEMAfSHmsherHwLsGoXs6qCFhvKtFczUpcSYL-yYt583YAu3NjX3Gtb7GWOzM8uvqoHvMhCsIouE3s4dyzgLXeaEcEaEzjBJNdehURwiPHUKYBBqZXElXUJ1qgAEQep2UmgdwXtvkBH4NAmbv5GXM7W3S2XAJMt68ZBsGS_pcII3ibgkoAfZIRUFIGBYp04LHhLV3nlSZJMIabeoULtJaMSlKDY8HBW4mBeIw9yEJCu_KrnCS2lJSOueu2XYcaltUTmUYQ0jeuo_qPvmhmo51WqW0u_sHTLqcXNl-srQ75KhL-_vkSg__93f3s1_7ecne_2D07yz3_v7rXu01Tvc6v84yjubeWc7_7rT3dnsfv_TO97r_Ty7T1auZX0ekOFWu2UfkopKtTIKIFhoRCxNpAWTCnlDC0lZJ-kYGR_8b8O78lqjMLwxMunnoHjaNM0MZwyAN6WP_j_-CblVXV5caCzM1eYfk9s4DE-naTJOhtc_frITAG_W9aS3oQp5d91mewHS4Qr0
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMw1V0xaxRBFH7EC0oao6gYTeIVWm6yM7s7O1uIGOORGA0WJhw258zOzgmBu2guBFOlCORMJwYiIkGxslArLRT8I9Z7x_0L3_N22dXCLoX1Mssyb99735tv3vcArjLDGMZe3-GeVY6vQuFEPEmc2HVNIGOTeAkxuveWxcKKf6ce1EfgW94LQ9cq85j4O1Cbdkxn5LOYhhD6Yszlsza7FnF_vnZj_YlDE6SIac3HaQx_kaXk2RaWbxvXF-fR1tc4r91-cGvBySYMOOvEIJGnC8tjwV0bWymtka41PGJaaNcogdGdWYUQiHSyhIpswHSoEABh2raR1NrD956AUSkQolZgdG517uFqGSxFZa14TLRclDQ40ZOkXxLPw8wQygIMcOpRZwUHSUrvIigyiUeUm1co3QTME5Esih1B6ls8E4ejvEQEqxi2W9GFtMBl9Yy35TRtqZ2Qaiin_kXy0j8Q98kt1bKq1Syl3to4_MyNNrxxszaz2dEz8fZfepb_p1XPwOmsIqjeHLrwWRjZfnwOvPTHp8Hei_TjYfruYPDqS9o97H9_2Tva7b_eHbw_Srs7aXcvfb7f29_pvfncf3vQ__D1PKwcy3degEqr3UouQlWFWhmF4NI10o-MpyWPFDGiCcINHYQTMJnvfyMLUhuNYvMnYDqzcPG0aZox_Q9YUjB26d_rr8ApNFvj7uLy0mUYo1V07M6CSah0nm4mU4jbOno6c5AqPDpu6_0CAPBQ-A
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E5%BE%AE%E9%87%91%E5%AD%97%E5%A1%94%E9%98%B5%E5%88%97%E7%BB%93%E6%9E%84%E7%9A%84%E9%A3%9E%E5%88%80%E5%88%87%E5%89%8A%E6%8A%80%E6%9C%AF%E7%A0%94%E7%A9%B6&rft.jtitle=%E5%85%89%E7%94%B5%E5%B7%A5%E7%A8%8B&rft.au=%E6%9D%9C%E4%B8%B9&rft.au=%E9%BB%84%E5%B2%B3%E7%94%B0&rft.au=%E8%8C%83%E6%96%8C&rft.date=2020-08-15&rft.pub=%E5%8C%97%E4%BA%AC%E8%B7%9F%E8%B8%AA%E4%B8%8E%E9%80%9A%E4%BF%A1%E6%8A%80%E6%9C%AF%E7%A0%94%E7%A9%B6%E6%89%80%2C%E5%8C%97%E4%BA%AC+100094%25%E4%B8%AD%E5%9B%BD%E7%A7%91%E5%AD%A6%E9%99%A2%E5%85%89%E7%94%B5%E6%8A%80%E6%9C%AF%E7%A0%94%E7%A9%B6%E6%89%80%2C%E5%9B%9B%E5%B7%9D+%E6%88%90%E9%83%BD+610209&rft.issn=1003-501X&rft.volume=47&rft.issue=8&rft.spage=104&rft.epage=110&rft_id=info:doi/10.12086%2Foee.2020.190179&rft.externalDocID=gdgc202008011
thumbnail_s http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fgdgc%2Fgdgc.jpg