나노-마이크로 하이브리드 3차원 적층 패턴의 제조

• Published in: Biuletyn Uniejowski Vol. 51; no. 6; pp. 387 - 392
• Main Authors: 박태완(Tae Wan Park), 정현성(Hyunsung Jung), 방지원(Jiwon Bang), 박운익(Woon Ik Park)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2018
• Subjects: 기계공학; Nanopatterning; Nano-transfer printing; Hybrid structure; 3D nanostructure
• ISSN: 1225-8024; 2299-8403; 2288-8403
• DOI: 10.5695/JKISE.2018.51.6.387

Nanopatterning is one of the essential nanotechnologies to fabricate electronic and energy nanodevices. Therefore, many research group members made a lot of efforts to develop simple and useful nanopatterning methods to obtain highly ordered nanostructures with functionality. In this study, in order to achieve pattern formation of three-dimensional (3D) hierarchical nanostructures, we introduce a simple and useful patterning method (nano-transfer printing (n-TP) process) consisting of various linewidths for diverse materials. Pt and $WO_3$ hybrid line structures were successfully stacked on a flexible polyimide substrate as a multi-layered hybrid 3D pattern of Pt/WO3/Pt with line-widths of $1{\mu}m$, $1{\mu}m$ and 250 nm, respectively. This simple approach suggests how to fabricate multiscale hybrid nanostructures composed of multiple materials. In addition, functional hybrid nanostructures can be expected to be applicable to various next-generation electronic devices, such as nonvolatile memories and energy harvesters.