SEM Tribosystem에 의한 CVD TiN막의 미시적 마모 특성 평가

• Published in: Biuletyn Uniejowski Vol. 37; no. 3; pp. 137 - 145
• Main Author: 문봉호(Bongho Moon)
• Format: Journal Article
• Language: Korean
• Published: 한국표면공학회 2004
• Subjects: 기계공학; SEM tribosystem; Specific wear amount; Microscopic wear; Wear mode; CVD TiN coating
• ISSN: 1225-8024; 2299-8403; 2288-8403

This study surveys the microscopic wear of CVD TiN coatings in repeated sliding, using the SEM Tribosystem as in-situ system. According to the research, the depth of wear groove and the specific wear amount are changed by the transition of the microscopic wear mode. This investigation leads to the fact that the change of wear characteristics produces the transition of the wear mode. In this survey, four modes are observed for CVD TiN coatings with the thickness of 1.6$\mu\textrm{m}$: ploughing, powder formation, flake formation and coating delimitation. The microscopic wear properties is quantitatively evaluated in terms with the microscopic wear mode and the specific wear amount. These relationships prove that the observation of wear modes with a SEM Tribosystem is useful to evaluate wear properties.