走査型プローブ顕微鏡データマネジメントの標準化

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Published inJournal of the Vacuum Society of Japan Vol. 56; no. 7; pp. 252 - 257
Main Author 藤田, 大介
Format Journal Article
LanguageJapanese
Published 一般社団法人 日本真空学会 2013
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ISSN1882-2398
1882-4749
DOI10.3131/jvsj2.56.252

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Author 藤田, 大介
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References 5) D. Fujita and K. Sagisaka: Sci. Technol. Adv. Mater., 9 (2008) 013003.
24) K. Onishi and D. Fujita: Anal. Sci., 27 (2011) 157.
7) ASTM E1813-96, “Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy”, (1996).
14) ISO 28600:2011 Surface chemical analysis—Data transfer format for scanning-probe microscopy (2011).
12) ISO 14976:1998 Surface chemical analysis—Data transfer format (1998).
19) C. A. Clifford and M. P. Seah: Meas. Sci. Technol., 20 (2009) 095103.
13) JIS K0141:2000 (ISO 14976:1998) (2000).
20) Y. -H. Chen and W. -H. Huang: Rev. Sci. Instrum., 78 (2007) 073701.
23) C. -M. Wang, H. Itoh, J. -L. Sun, J. Hu, D. -H. Shen and S. Ichimura: J. Nanosci. Nanotechnol., 9 (2009) 803.
8) T. Kurosawa: J. Surf. Anal., 11 (2004) 178.
22) M. Xu, D. Fujita and K. Onishi: Rev. Sci. Instrum., 80 (2009) 043703.
2) R. Young, J. Ward and F. Scire: Rev. Sci. Instrum., 43 (1972) 999.
25) J. S. Villarrubia: J. Res. Natl. Stand. Technol., 102 (1997) 425.
18) W. -H. Huang, W. -W. Wang, A. -D. Xia, N. Jin and Z. -Q. Hu: J. Vac. Sci. Technol. B, 18 (2000) 2027.
6) T. Ohmura, A. Kurokawa, T. Homma, D. Fujita, K. Goto, M. Uemura, H. Tokutaka, K. Yoshihara, M. Kurahashi, S. Ichimura, C. Oshima, F. Soeda, Y. Fukuda, Y. Hashiguchi, K. Tanaka, M. Kudo, T. Hayashi, A. Tanaka, Y. Shiokawa, T. Sekine and R. Shimizu: Shinku, 31 (1988) 744.
11) ISO 18115-2:2010 Surface chemical analysis—Vocabulary Part 2: Terms used in scanning-probe microscopy (2010).
21) M. Abe, Y. Sugimoto, T. Namikawa, K. Morita, N. Oyabu and S. Morita: Appl. Phys. Lett., 90 (2007) 203103.
9) S. Ichimura and H. Nonaka: Nanotechnology Standards (Springer, New York, 2011) p. 132.
15) http://www.nims.go.jp/research/organization/akt-database.html
16) D. Fujita, K. Onishi and M. Xu: J. Phys. Conf. Ser., 159 (2009) 012002.
10) D. Fujita, H. Itoh, S. Ichimura and T. Kurosawa: Nanotechnology, 18 (2007) 084002.
4) H. X. Guo and D. Fujita: Rev. Sci. Instrum., 82 (2011) 123706.
17) ISO 11039:2012 Surface chemical analysis—Scanning-probe microscopy—Measurement of drift rate (2012).
3) G. Binnig, C. F. Quate and Ch. Gerber: Phys. Rev. Lett., 56 (1986) 930.
1) G. Binnig and H. Rohrer: Helv. Phys. Acta, 55 (1982) 726.
References_xml – reference: 18) W. -H. Huang, W. -W. Wang, A. -D. Xia, N. Jin and Z. -Q. Hu: J. Vac. Sci. Technol. B, 18 (2000) 2027.
– reference: 19) C. A. Clifford and M. P. Seah: Meas. Sci. Technol., 20 (2009) 095103.
– reference: 16) D. Fujita, K. Onishi and M. Xu: J. Phys. Conf. Ser., 159 (2009) 012002.
– reference: 3) G. Binnig, C. F. Quate and Ch. Gerber: Phys. Rev. Lett., 56 (1986) 930.
– reference: 6) T. Ohmura, A. Kurokawa, T. Homma, D. Fujita, K. Goto, M. Uemura, H. Tokutaka, K. Yoshihara, M. Kurahashi, S. Ichimura, C. Oshima, F. Soeda, Y. Fukuda, Y. Hashiguchi, K. Tanaka, M. Kudo, T. Hayashi, A. Tanaka, Y. Shiokawa, T. Sekine and R. Shimizu: Shinku, 31 (1988) 744.
– reference: 7) ASTM E1813-96, “Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy”, (1996).
– reference: 17) ISO 11039:2012 Surface chemical analysis—Scanning-probe microscopy—Measurement of drift rate (2012).
– reference: 20) Y. -H. Chen and W. -H. Huang: Rev. Sci. Instrum., 78 (2007) 073701.
– reference: 22) M. Xu, D. Fujita and K. Onishi: Rev. Sci. Instrum., 80 (2009) 043703.
– reference: 10) D. Fujita, H. Itoh, S. Ichimura and T. Kurosawa: Nanotechnology, 18 (2007) 084002.
– reference: 11) ISO 18115-2:2010 Surface chemical analysis—Vocabulary Part 2: Terms used in scanning-probe microscopy (2010).
– reference: 24) K. Onishi and D. Fujita: Anal. Sci., 27 (2011) 157.
– reference: 2) R. Young, J. Ward and F. Scire: Rev. Sci. Instrum., 43 (1972) 999.
– reference: 15) http://www.nims.go.jp/research/organization/akt-database.html
– reference: 21) M. Abe, Y. Sugimoto, T. Namikawa, K. Morita, N. Oyabu and S. Morita: Appl. Phys. Lett., 90 (2007) 203103.
– reference: 14) ISO 28600:2011 Surface chemical analysis—Data transfer format for scanning-probe microscopy (2011).
– reference: 4) H. X. Guo and D. Fujita: Rev. Sci. Instrum., 82 (2011) 123706.
– reference: 23) C. -M. Wang, H. Itoh, J. -L. Sun, J. Hu, D. -H. Shen and S. Ichimura: J. Nanosci. Nanotechnol., 9 (2009) 803.
– reference: 13) JIS K0141:2000 (ISO 14976:1998) (2000).
– reference: 5) D. Fujita and K. Sagisaka: Sci. Technol. Adv. Mater., 9 (2008) 013003.
– reference: 1) G. Binnig and H. Rohrer: Helv. Phys. Acta, 55 (1982) 726.
– reference: 12) ISO 14976:1998 Surface chemical analysis—Data transfer format (1998).
– reference: 9) S. Ichimura and H. Nonaka: Nanotechnology Standards (Springer, New York, 2011) p. 132.
– reference: 25) J. S. Villarrubia: J. Res. Natl. Stand. Technol., 102 (1997) 425.
– reference: 8) T. Kurosawa: J. Surf. Anal., 11 (2004) 178.
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Title 走査型プローブ顕微鏡データマネジメントの標準化
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