シリコン単結晶製造時における融液の流れ

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Published inながれ : 日本流体力学会誌 Vol. 13; no. 1; pp. 5 - 15
Main Authors 江口, 実, 日比谷, 孟俊, 渡辺, 匡人, 柿本, 浩一
Format Journal Article
LanguageJapanese
Published 社団法人 日本流体力学会 28.02.1994
Online AccessGet full text
ISSN0286-3154
2185-4912
DOI10.11426/nagare1982.13.5

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Author 日比谷, 孟俊
柿本, 浩一
渡辺, 匡人
江口, 実
Author_FL WATANABE Masahito
HIBIYA Taketoshi
EGUCHI Minoru
KAKIMOTO Koichi
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Author_xml – sequence: 1
  fullname: 江口, 実
  organization: NEC基礎研究所
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  fullname: 日比谷, 孟俊
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  fullname: 渡辺, 匡人
  organization: NEC基礎研究所
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  fullname: 柿本, 浩一
  organization: NEC基礎研究所
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DocumentTitleAlternate Melt Flow during Silicon Crystal Growth
DocumentTitle_FL Melt Flow during Silicon Crystal Growth
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References 11) M. Y. Ryckmans, P. Nicodemea & F. Dupret : J. Crystal Growth 99 (1990) 702.
25) M. Watanabe, M. Eguchi, K. Kakimoto, Y. Baros & T. Hibiya : J. Crystal Growth 128 (1993) 288.
15) 田中正博, 江坂久夫, 岸田豊 : 日本結晶成長学会誌 (1991) 26.
8) J. J. Derby & R. A. Brown : J. Crystal Growth 74 (1986) 605.
10) T. Tsukada, N. Imaishi, M. Hozawa & K. Fujinawa : J. Chem. Eng. Japan 20 (1987) 146.
12) M. Michelcic, S. Schrock-Pauli, K. Wingerath, H. Wenzel, W. Uelhof & A. Vander Hart : J. Crystal Growth 57 (1982) 300.
18) K. Kakimoto, M. Watanabe, M. Eguchi & T. Hibiya : J. Crystal Growth : 126 (1993) 435.
1) 津屋英樹, 松井純爾 : 応用物理20 (1991) 108.
9) S. Miyahara, S. Kobayashi, T. Fujiwara, T. Kubo & H. Fujiwara : J. Crystal Growth 99 (1990) 696.
27) 渡辺匡人, 柿本浩一, 江口実, 日比谷孟俊 : 第30回日本伝熱シンポジゥム (1993).
13) A. Bottaro & A. Zebib : J. Crystal Growth 97 (1989) 50.
5) E. Takeuchi, J. Sakane, H. Yano, I. Miyoshino, T. Saeki & H. Kajioka : Liquid Metal Magnetohydrodynamics (ed. J. Lielpeteris & R. Moreau, 1989) 347-354.
6) D. Elwell, E. Andersen & R. R. Dils : J. Crystal Growth 98 (1989) 667.
21) K. Kakimoto, P. Nicodeme, M. Lecomte, F. Dupret & M. J. Crochet : J. Crystal Growth 112 (1991) 715.
26) R. Hide & P. J. Mason : Advan. Phys. 4 (1975) 47.
22) P. G. Drazin & W. H. Reid : Hydrodynamic Stability (Cambridge University Press, 1981) 333.
23) 木村竜治 : 地球流体力学入門 (東京堂出版, 1983) 第11章.
7) P. A. C. Whiffin, T. M. Bruton & J. C. Brice : J. Crystal Growth 32 (1976) 205.
17) M. Watanabe, K. Kakimoto, M. Eguchi & T. Hibiya : Proc. of ASME 128 (1991) 255.
14) M. Michelcic & K. Wingerath : J. Crystal Growth 97 (1989) 42.
20) 柿本浩一, 渡辺匡人, 江口実, 日比谷孟俊, 第40回応用物理学会関係連合講演会発表 (1993).
3) V. M. Glazov, S. N. Chizhevskaya & N. N. Glagoleva : Liquid Semiconductors (Prenum Press, 1969) 68.
16) K. Kakimoto, M. Eguchi, H. Watanabe & T. Hibiya : J. Crystal Growth 88 (1988) 365.
19) M. Watanabe, K. Kakimoto, M. Eguchi & T. Hibiya : Proc. of 10th to be published in J. Crystal Growth (1993).
4) Yu. M. Gelfgart, L. A. Gorbunov & M. Z. Sorkin : Rost Kristallov 16 (1988) 234.
2) W. E. Langlois : PCH Physico-Chemical Hydrodynamics 2 (1981) 245-261.
24) R. L. Pfeffer & W. Fowlis : J. Atmospheric Science 25 (1968) 361.
References_xml – reference: 12) M. Michelcic, S. Schrock-Pauli, K. Wingerath, H. Wenzel, W. Uelhof & A. Vander Hart : J. Crystal Growth 57 (1982) 300.
– reference: 18) K. Kakimoto, M. Watanabe, M. Eguchi & T. Hibiya : J. Crystal Growth : 126 (1993) 435.
– reference: 3) V. M. Glazov, S. N. Chizhevskaya & N. N. Glagoleva : Liquid Semiconductors (Prenum Press, 1969) 68.
– reference: 24) R. L. Pfeffer & W. Fowlis : J. Atmospheric Science 25 (1968) 361.
– reference: 2) W. E. Langlois : PCH Physico-Chemical Hydrodynamics 2 (1981) 245-261.
– reference: 1) 津屋英樹, 松井純爾 : 応用物理20 (1991) 108.
– reference: 7) P. A. C. Whiffin, T. M. Bruton & J. C. Brice : J. Crystal Growth 32 (1976) 205.
– reference: 11) M. Y. Ryckmans, P. Nicodemea & F. Dupret : J. Crystal Growth 99 (1990) 702.
– reference: 14) M. Michelcic & K. Wingerath : J. Crystal Growth 97 (1989) 42.
– reference: 6) D. Elwell, E. Andersen & R. R. Dils : J. Crystal Growth 98 (1989) 667.
– reference: 26) R. Hide & P. J. Mason : Advan. Phys. 4 (1975) 47.
– reference: 5) E. Takeuchi, J. Sakane, H. Yano, I. Miyoshino, T. Saeki & H. Kajioka : Liquid Metal Magnetohydrodynamics (ed. J. Lielpeteris & R. Moreau, 1989) 347-354.
– reference: 15) 田中正博, 江坂久夫, 岸田豊 : 日本結晶成長学会誌 (1991) 26.
– reference: 9) S. Miyahara, S. Kobayashi, T. Fujiwara, T. Kubo & H. Fujiwara : J. Crystal Growth 99 (1990) 696.
– reference: 19) M. Watanabe, K. Kakimoto, M. Eguchi & T. Hibiya : Proc. of 10th to be published in J. Crystal Growth (1993).
– reference: 22) P. G. Drazin & W. H. Reid : Hydrodynamic Stability (Cambridge University Press, 1981) 333.
– reference: 16) K. Kakimoto, M. Eguchi, H. Watanabe & T. Hibiya : J. Crystal Growth 88 (1988) 365.
– reference: 25) M. Watanabe, M. Eguchi, K. Kakimoto, Y. Baros & T. Hibiya : J. Crystal Growth 128 (1993) 288.
– reference: 10) T. Tsukada, N. Imaishi, M. Hozawa & K. Fujinawa : J. Chem. Eng. Japan 20 (1987) 146.
– reference: 13) A. Bottaro & A. Zebib : J. Crystal Growth 97 (1989) 50.
– reference: 21) K. Kakimoto, P. Nicodeme, M. Lecomte, F. Dupret & M. J. Crochet : J. Crystal Growth 112 (1991) 715.
– reference: 23) 木村竜治 : 地球流体力学入門 (東京堂出版, 1983) 第11章.
– reference: 17) M. Watanabe, K. Kakimoto, M. Eguchi & T. Hibiya : Proc. of ASME 128 (1991) 255.
– reference: 4) Yu. M. Gelfgart, L. A. Gorbunov & M. Z. Sorkin : Rost Kristallov 16 (1988) 234.
– reference: 8) J. J. Derby & R. A. Brown : J. Crystal Growth 74 (1986) 605.
– reference: 20) 柿本浩一, 渡辺匡人, 江口実, 日比谷孟俊, 第40回応用物理学会関係連合講演会発表 (1993).
– reference: 27) 渡辺匡人, 柿本浩一, 江口実, 日比谷孟俊 : 第30回日本伝熱シンポジゥム (1993).
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Title シリコン単結晶製造時における融液の流れ
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