金のエッチング
Saved in:
| Published in | 実務表面技術 Vol. 35; no. 11; pp. 563 - 566 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | Japanese |
| Published |
一般社団法人 表面技術協会
01.11.1988
|
| Online Access | Get full text |
| ISSN | 0368-2358 1884-3417 |
| DOI | 10.4139/sfj1970.35.563 |
Cover
| Author | 片山, 康平 |
|---|---|
| Author_xml | – sequence: 1 fullname: 片山, 康平 organization: 三菱電機 (株) 通信機製作所 |
| BookMark | eNo9jz1Ow0AUhFcoSJiQEm5h4-e3u94tURR-pEg0UK_e_hiyCgHZaSgTF9TcggohcaStuAWWsJhiphhpNN8xm2yeN4GxMygLDqjPuyaCrssCRSEkHrAMlOI5cqgnLCtRqrxCoY7YrOtiOUjUGoXO2OnP23vafab9R-r71O9S_532XyfssKF1F2ZjTtn95eJufp0vb69u5hfLPEKlKLcCJAapfQigvLQAgfuGODYkCLz03JFVVROsclwFB2L46ITzZC1wV-KULf52Y7elh2Be2tUTta-G2u3KrYMZqQwKAzD6gPffu0dqTST8BaROUXQ |
| ContentType | Journal Article |
| Copyright | (社)表面技術協会 |
| Copyright_xml | – notice: (社)表面技術協会 |
| DOI | 10.4139/sfj1970.35.563 |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1884-3417 |
| EndPage | 566 |
| ExternalDocumentID | article_sfj1970_35_11_35_11_563_article_char_ja |
| GroupedDBID | ALMA_UNASSIGNED_HOLDINGS JSF KQ8 RJT |
| ID | FETCH-LOGICAL-j128a-b5163e69dee18d6b11e4dfa43fa5a1d6d4cab82feb8c48ec15197c5cdabb14c03 |
| ISSN | 0368-2358 |
| IngestDate | Wed Apr 05 06:53:47 EDT 2023 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Issue | 11 |
| Language | Japanese |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-j128a-b5163e69dee18d6b11e4dfa43fa5a1d6d4cab82feb8c48ec15197c5cdabb14c03 |
| OpenAccessLink | https://www.jstage.jst.go.jp/article/sfj1970/35/11/35_11_563/_article/-char/ja |
| PageCount | 4 |
| ParticipantIDs | jstage_primary_article_sfj1970_35_11_35_11_563_article_char_ja |
| PublicationCentury | 1900 |
| PublicationDate | 1988/11/01 |
| PublicationDateYYYYMMDD | 1988-11-01 |
| PublicationDate_xml | – month: 11 year: 1988 text: 1988/11/01 day: 01 |
| PublicationDecade | 1980 |
| PublicationTitle | 実務表面技術 |
| PublicationTitleAlternate | 実務表面技術 |
| PublicationYear | 1988 |
| Publisher | 一般社団法人 表面技術協会 |
| Publisher_xml | – name: 一般社団法人 表面技術協会 |
| References | 3) 可児康之, 遠藤昇; 電子技術, 日刊工業新聞社, 27, No. 15 (1985 2) 千谷利三; 新版無機化学下巻, 産業図書株式会社 (1965 1) 楢岡清威, 二瓶公志; フォトエッチングと微細加工, 総合電子出版社 (1977 |
| References_xml | – reference: 2) 千谷利三; 新版無機化学下巻, 産業図書株式会社 (1965) – reference: 3) 可児康之, 遠藤昇; 電子技術, 日刊工業新聞社, 27, No. 15 (1985) – reference: 1) 楢岡清威, 二瓶公志; フォトエッチングと微細加工, 総合電子出版社 (1977) |
| SSID | ssj0000579359 ssib001234121 |
| Score | 1.2685785 |
| SourceID | jstage |
| SourceType | Publisher |
| StartPage | 563 |
| Title | 金のエッチング |
| URI | https://www.jstage.jst.go.jp/article/sfj1970/35/11/35_11_563/_article/-char/ja |
| Volume | 35 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| ispartofPNX | 実務表面技術, 1988/11/01, Vol.35(11), pp.563-566 |
| journalDatabaseRights | – providerCode: PRVAFT databaseName: Open Access Digital Library customDbUrl: eissn: 1884-3417 dateEnd: 19881231 omitProxy: true ssIdentifier: ssj0000579359 issn: 0368-2358 databaseCode: KQ8 dateStart: 19700101 isFulltext: true titleUrlDefault: http://grweb.coalliance.org/oadl/oadl.html providerName: Colorado Alliance of Research Libraries |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3NbtQwELZW5QIHxE8R_-oBn1CWdWwn9gXJ2aaqQCAhtVJvke04hxxKBdsLt3YPnHkLTgiJR-ERcuItGP_sNiv10IIUWRPHMxlnovFnxzNB6IWgXVGUzmRWdmXGLLWZKS3PDLVCgzfshPPrkO_eF_uH7M0RP5pMfo92LZ0uzNR-uTSu5F-sCnVgVx8lew3LroVCBdBgXyjBwlBeyca4lhgm85LgmgIkxKoORI6VCEQ4EkESUdHUppqNgSmuuWeXe54QFZYS1wIrEkRJLHexynFdYKH83oh4Sa59Bq5LLIIuwF0Rf4DpwonCVayVcOuLNQYi4SmTjTUGXDNciSRewB3mXqyCytoLkBVW1KsAPZA8NAbZ6uVV9Ayd2sWSBbY5lmrkAGkB9qYxtfvURQctBMtg5C3HHjwmPFm9qWTkj3nyni6dFZeNGjCO-6Srn7ueyHI2pXy6ZtvIxJ3s3KSGDeUwf0olcDSr6z5erukBtN_IYajx_xN5-2H0aTIH9RNmignoSx8dHb-px_7G5KJerVebSgFM6mHSsNpwGDDQwR10O01edlTU4C6a9PoeujVKaXkfbf_5-m04-zGcfx-Wy2F5Nix_Dec_t9HhXn0w38_SrzeyHgCLzgwHnO4K2TpHRFsYQhxrO81op7kmbdEyq43IO2eEZcJZ4uOfLbetNoYwO6MP0Nbxx2P3EO2U2kieu9walzPezjRAZlkAbqTSalnwR-h17FNzEvOrNNd8zo__V8ATdPPipX-KthafTt0zgJoL8zyY7i9bPV8B |
| linkProvider | Colorado Alliance of Research Libraries |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E9%87%91%E3%81%AE%E3%82%A8%E3%83%83%E3%83%81%E3%83%B3%E3%82%B0&rft.jtitle=%E5%AE%9F%E5%8B%99%E8%A1%A8%E9%9D%A2%E6%8A%80%E8%A1%93&rft.au=%E7%89%87%E5%B1%B1%2C+%E5%BA%B7%E5%B9%B3&rft.date=1988-11-01&rft.pub=%E4%B8%80%E8%88%AC%E7%A4%BE%E5%9B%A3%E6%B3%95%E4%BA%BA+%E8%A1%A8%E9%9D%A2%E6%8A%80%E8%A1%93%E5%8D%94%E4%BC%9A&rft.issn=0368-2358&rft.eissn=1884-3417&rft.volume=35&rft.issue=11&rft.spage=563&rft.epage=566&rft_id=info:doi/10.4139%2Fsfj1970.35.563&rft.externalDocID=article_sfj1970_35_11_35_11_563_article_char_ja |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0368-2358&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0368-2358&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0368-2358&client=summon |