R.F誘導結合型プラズマを用いたスパッタリングによる窒化ホウ素薄膜の作製

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Published in表面技術 Vol. 47; no. 10; pp. 887 - 888
Main Authors 浅沼, 治朋, 伊藤, 滋, 明石, 和夫, 賀曽利, 裕
Format Journal Article
LanguageEnglish
Published 一般社団法人 表面技術協会 01.10.1996
Online AccessGet full text
ISSN0915-1869
1884-3409
DOI10.4139/sfj.47.887

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Author 賀曽利, 裕
浅沼, 治朋
伊藤, 滋
明石, 和夫
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  fullname: 明石, 和夫
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  fullname: 賀曽利, 裕
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References 1) M. Mieno and T. Yoshida; J. Appl. Phys., 29, L1175 (1990
2) Y. Taki, Y. Kasori, S. Ito, and K. Akashi; J. Surf. Finishing Soc. Jap., 46, 351 (1995
References_xml – reference: 1) M. Mieno and T. Yoshida; J. Appl. Phys., 29, L1175 (1990)
– reference: 2) Y. Taki, Y. Kasori, S. Ito, and K. Akashi; J. Surf. Finishing Soc. Jap., 46, 351 (1995)
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Title R.F誘導結合型プラズマを用いたスパッタリングによる窒化ホウ素薄膜の作製
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