A Novel MEMS Parallel-beam Acceleration Switch

By utilizing the threshold characteristic and nonlinear transversal stiffness of a post-buckling beam with both ends fixed, a novel parallel-beam acceleration switch was designed. The dynamic model of the switch subjected to multi-forces was established by using post-buckling theory of beams, the da...

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Bibliographic Details
Published in2006 2nd IEEE/ASME International Conference on Mechatronics and Embedded Systems and Applications pp. 1 - 5
Main Authors Zhao, Jian, Jia, Jianyuan, Chen, Guangyan
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2006
Subjects
Acceleration
Contacts
Damping
Micromechanical devices
Nonlinear equations
Numerical simulation
Particle beams
Physics
Pulse measurements
Switches
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ISBN9780780397217
0780397215
DOI10.1109/MESA.2006.296987

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Summary:By utilizing the threshold characteristic and nonlinear transversal stiffness of a post-buckling beam with both ends fixed, a novel parallel-beam acceleration switch was designed. The dynamic model of the switch subjected to multi-forces was established by using post-buckling theory of beams, the damping force was calculated using the Reynolds equations, and the tip-to-drain contact was modeled by elastic Hertz theory. The good threshold characteristic, high contact reliability and anti-jamming performance of the switch were showed after the dynamic numerical simulation. The effect of the damping force and the contact force on the reliability of the switch was analyzed. The response time is less than 6ms when the switch is triggered by a threshold acceleration a c =25g, and the switch cut off quickly when the acceleration is under a d =5g. Therefore, the feasibility of applying the post-buckled beam in designing the acceleration switches was validated
ISBN:9780780397217
0780397215
DOI:10.1109/MESA.2006.296987