APA (7th ed.) Citation

Kim, K. J., Kim, A., Kim, C. S., Song, S. W., Ruh, H., Unger, W. E. S., . . . Jeynes, C. (2021). Thickness measurement of nm HfO2 films. Metrologia, 58(1A), . https://doi.org/10.1088/0026-1394/58/1A/08016

Chicago Style (17th ed.) Citation

Kim, K J., et al. "Thickness Measurement of Nm HfO2 Films." Metrologia 58, no. 1A (2021). https://doi.org/10.1088/0026-1394/58/1A/08016.

MLA (9th ed.) Citation

Kim, K J., et al. "Thickness Measurement of Nm HfO2 Films." Metrologia, vol. 58, no. 1A, 2021, https://doi.org/10.1088/0026-1394/58/1A/08016.