Characterization and reliability of TaN thin film resistors - Lee, T.; Watson, K.; Fen Chen; Gill, J.; Harmon, D.; Sullivan, T.; Baozhen Li (2004 IEEE International Realiability Physics Symposium, 2004)
Keywords: Applied sciences; Degradation; Design. Technologies. Operation analysis. Testing; Electronic equipment and fabrication. Passive components, printed wiring boards, connectics; Electronics; Exact sciences and technology; Fabrication; Heating; Integrated circuits; Radiofrequency integrated circuits; Resistors; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Stress; Temperature control; Temperature distribution; Transistors; Voltage; Electric stress; Durability; Thin film resistor; Temperature coefficient; Critical current; Interconnection; Complementary MOS technology; Integrated circuit; Radiofrequency integrated circuits; Reliability; Resistor; Joule effect; Damaging