Low-Frequency Noise Measurements for Electromigration Characterization in BEOL Interconnects - Beyne, S.; Croes, K.; Pedreira, O. Varela; Arnoldi, L.; van der Veen, M. H.; De Wolf, I.; Tokei, Zs (IEEE International Integrated Reliability Workshop final report, 2019)
Keywords: BEOL reliability; cobalt; Conferences; Electromigration; Energy measurement; interconnects; Life estimation; Low frequency noise; Metallization; Noise measurement; Reliability; Ruthenium