Correction of SEM image distortion based on non-equidistant GM(1,1) model

• Published in: 2012 International Conference on Wavelet Analysis and Pattern Recognition pp. 20 - 23
• Main Authors: Xi Chen, Hua Han, Qi-Wei Xie, Li-Jun Shen
• Format: Conference Proceeding
• Language: English; Japanese
• Published: IEEE 01.07.2012
• Subjects: Electron beams; Equations; Grey System Theory; Image Distortion Correction; Mathematical model; Non-equidistant GM; Nonlinear distortion; Numerical analysis; Scanning electron microscopy; SEM Image
• ISBN: 9781467315340; 1467315346
• ISSN: 2158-5695
• DOI: 10.1109/ICWAPR.2012.6294748

Scanning Electron Microscope (SEM) is widely used in many fields to look into the nanometer world. However, there is non-linear distortion near the left boundary of high resolution images captured by SEM, which has bad effect on image processing such as image mosaic. In this paper, we propose a method to correct such distortion based on non-equidistant GM(1,1) model. We first extract pair-wise points which are the same position on target scene from two overlapped images respectively. Then the distortion is modeled using non-equidistant GM(1,1) which maps pixels of distorted image to their true positions. Finally, the corrected image is obtained with image interpolation. There is no need to pre-define the distortion model or parameters for the proposed method, and it is easy to use and flexible. Experiments show that the proposed method yields accurate correction results.