Correction of SEM image distortion based on non-equidistant GM(1,1) model - Xi Chen; Hua Han; Qi-Wei Xie; Li-Jun Shen (2012 International Conference on Wavelet Analysis and Pattern Recognition, 2012)
Keywords: Electron beams; Equations; Grey System Theory; Image Distortion Correction; Mathematical model; Non-equidistant GM; Nonlinear distortion; Numerical analysis; Scanning electron microscopy; SEM Image