Ding, D., Wu, X., Ghosh, J., & Pan, D. (2009, May). Machine learning based lithographic hotspot detection with critical-feature extraction and classification. 2009 IEEE International Conference on IC Design and Technology, 219-222. https://doi.org/10.1109/ICICDT.2009.5166300
Chicago Style (17th ed.) CitationDing, Duo, Xiang Wu, J. Ghosh, and D.Z Pan. "Machine Learning Based Lithographic Hotspot Detection with Critical-feature Extraction and Classification." 2009 IEEE International Conference on IC Design and Technology May. 2009: 219-222. https://doi.org/10.1109/ICICDT.2009.5166300.
MLA (9th ed.) CitationDing, Duo, et al. "Machine Learning Based Lithographic Hotspot Detection with Critical-feature Extraction and Classification." 2009 IEEE International Conference on IC Design and Technology, May. 2009, pp. 219-222, https://doi.org/10.1109/ICICDT.2009.5166300.