Wafer Level Packaging for MEMS Geiger Counter - Miyamoto, Asei; Hashimoto, Taichi; Makimura, Kenichi; Kanda, Kensuke; Fujita, Takayuki; Maenaka, Kazusuke (2012 Fifth International Conference on Emerging Trends in Engineering and Technology, 2012)
Keywords: Anodes; Bonding; Gamma-rays; Geiger counter; Glass; MEMS; Micromechanical devices; Radiation detectors; Radioactive materials; Sensitivity; Silicon; wafer level packaging; Windows