APA (7th ed.) Citation

Ueda, T., Kiso, O., Abe, S., Takezawa, Y., Matsumaro, K., Suzuki, C., . . . Ogawa, S. (2020, October 5). Suppression of H2O absorption by hydrophobic-like surface of SiOx without Si-OH group. Proceedings of the IEEE International Interconnect Technology Conference, 100-102. https://doi.org/10.1109/IITC47697.2020.9515669

Chicago Style (17th ed.) Citation

Ueda, Tetsuya, Osamu Kiso, Shoji Abe, Yasunari Takezawa, Kazuyuki Matsumaro, Chikashi Suzuki, Munehiro Toyama, and Shinichi Ogawa. "Suppression of H2O Absorption by Hydrophobic-like Surface of SiOx Without Si-OH Group." Proceedings of the IEEE International Interconnect Technology Conference 5 Oct. 2020: 100-102. https://doi.org/10.1109/IITC47697.2020.9515669.

MLA (9th ed.) Citation

Ueda, Tetsuya, et al. "Suppression of H2O Absorption by Hydrophobic-like Surface of SiOx Without Si-OH Group." Proceedings of the IEEE International Interconnect Technology Conference, 5 Oct. 2020, pp. 100-102, https://doi.org/10.1109/IITC47697.2020.9515669.