A RLS run-to-run control approach for semiconductor manufacturing process - Shujie Liu; Ying Zheng; Ming Luo; Yanwei Wang (2012 10th World Congress on Intelligent Control and Automation (WCICA, 2012)
Keywords: Convergence; data-based method; drift disturbance; Equations; Manufacturing processes; Mathematical model; Process control; RLS; Run-to-Run control; Semiconductor device modeling; variable forgetting factor