TaN thin film study for Superconducting BEOL integration - Segaud, R.; Chene, T.; Gergaud, P.; Minoret, S.; Gustavo, F.; Garrione, J.; Royer, A.; Nemouchi, F. (Proceedings of the IEEE International Interconnect Technology Conference, 2023)
Keywords: Dielectrics; Etching; Metallization; patterning approach; Superconducting BEOL; Superconducting epitaxial layers; Superconducting materials; Superconducting thin films; TaN