Dynamic Sampling for Risk Minimization in Semiconductor Manufacturing - Le Quere, Etienne; Dauzere-Peres, Stephane; Tamssaouet, Karim; Maufront, Cedric; Astie, Stephane (Proceedings - Winter Simulation Conference, 2020)
Keywords: Computational modeling; Manufacturing; Process control; Risk management; Semiconductor device measurement; Semiconductor device modeling