APA (7th ed.) Citation

Cheng, F., Yang, H., & Tsai, C. (2002). Development of a service management scheme for semiconductor factory management systems. IEEE International Conference on Robotics and Automation 2002, 4, 3607-3612 vol.4. https://doi.org/10.1109/ROBOT.2002.1014269

Chicago Style (17th ed.) Citation

Cheng, Fan-Tien, Haw-Ching Yang, and Chia-Ying Tsai. "Development of a Service Management Scheme for Semiconductor Factory Management Systems." IEEE International Conference on Robotics and Automation 2002 4 (2002): 3607-3612 vol.4. https://doi.org/10.1109/ROBOT.2002.1014269.

MLA (9th ed.) Citation

Cheng, Fan-Tien, et al. "Development of a Service Management Scheme for Semiconductor Factory Management Systems." IEEE International Conference on Robotics and Automation 2002, vol. 4, 2002, pp. 3607-3612 vol.4, https://doi.org/10.1109/ROBOT.2002.1014269.