Polarity-switching Top Coats for Silicon-containing Block Copolymer Orientation Control

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Bibliographic Details
Published inJournal of Photopolymer Science and Technology Vol. 26; no. 2; pp. 223 - 224
Main Authors Maher, Michael J., Cushen, Julia D., Li, Litan, Ellison, Christopher, Willson, C. Grant, Durand, William J., Blachut, Greg, Thio, Anthony, Dean, Leon M., Bates, Christopher M.
Format Journal Article
LanguageEnglish
Published Hiratsuka The Society of Photopolymer Science and Technology(SPST) 01.01.2013
Japan Science and Technology Agency
Subjects
block copolymer
directed self-assembly
thermal annealing
top coat
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ISSN0914-9244
1349-6336
DOI10.2494/photopolymer.26.223

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ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.26.223