APA (7th ed.) Citation

Park, J., Choi, Y., Kwon, S., Lee, Y., Kim, J., Kim, J., . . . Kim, K. (2024). Microsphere-assisted hyperspectral imaging: Super-resolution, non-destructive metrology for semiconductor devices. Light, science & applications, 13(1), 122-14. https://doi.org/10.1038/s41377-024-01469-3

Chicago Style (17th ed.) Citation

Park, Jangryul, et al. "Microsphere-assisted Hyperspectral Imaging: Super-resolution, Non-destructive Metrology for Semiconductor Devices." Light, Science & Applications 13, no. 1 (2024): 122-14. https://doi.org/10.1038/s41377-024-01469-3.

MLA (9th ed.) Citation

Park, Jangryul, et al. "Microsphere-assisted Hyperspectral Imaging: Super-resolution, Non-destructive Metrology for Semiconductor Devices." Light, Science & Applications, vol. 13, no. 1, 2024, pp. 122-14, https://doi.org/10.1038/s41377-024-01469-3.