Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM

The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used i...

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Published inMicromachines (Basel) Vol. 13; no. 12; p. 2056
Main Authors Wang, Xinwang, Cao, Huiliang
Format Journal Article
LanguageEnglish
Published Switzerland MDPI AG 24.11.2022
MDPI
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ISSN2072-666X
2072-666X
DOI10.3390/mi13122056

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Abstract The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
AbstractList The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition-extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks-long short-term memory (CNN-LSTM) and particle swarm optimization-support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from -40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10-4 to 1.0533 × 10-6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10-4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10-5 to 1.4985 × 10-6. Furthermore, the output of the MEMS gyroscope ranging from 60 to -40 °C reduced. The factor of Q reduced from 2.9808 × 10-4 to 2.4430 × 10-6, the factor of B reduced from 0.0145 to 7.2426 × 10-4, and the factor of N reduced from 4.5072 × 10-5 to 1.0523 × 10-5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition-extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks-long short-term memory (CNN-LSTM) and particle swarm optimization-support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from -40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10-4 to 1.0533 × 10-6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10-4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10-5 to 1.4985 × 10-6. Furthermore, the output of the MEMS gyroscope ranging from 60 to -40 °C reduced. The factor of Q reduced from 2.9808 × 10-4 to 2.4430 × 10-6, the factor of B reduced from 0.0145 to 7.2426 × 10-4, and the factor of N reduced from 4.5072 × 10-5 to 1.0523 × 10-5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition-extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks-long short-term memory (CNN-LSTM) and particle swarm optimization-support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from -40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10 to 1.0533 × 10 , the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10 , and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10 to 1.4985 × 10 . Furthermore, the output of the MEMS gyroscope ranging from 60 to -40 °C reduced. The factor of Q reduced from 2.9808 × 10 to 2.4430 × 10 , the factor of B reduced from 0.0145 to 7.2426 × 10 , and the factor of N reduced from 4.5072 × 10 to 1.0523 × 10 . The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10[sup.−4] to 1.0533 × 10[sup.−6], the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10[sup.−4], and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10[sup.−5] to 1.4985 × 10[sup.−6]. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10[sup.−4] to 2.4430 × 10[sup.−6], the factor of B reduced from 0.0145 to 7.2426 × 10[sup.−4], and the factor of N reduced from 4.5072 × 10[sup.−5] to 1.0523 × 10[sup.−5]. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy.
Audience Academic
Author Cao, Huiliang
Wang, Xinwang
AuthorAffiliation 2 Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
1 School of Instrument Science and Engineering, Southeast University, Nanjing 210018, China
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Cites_doi 10.1142/S0217984917500646
10.3390/mi10120823
10.3390/electronics9030499
10.1109/TCPMT.2014.2327958
10.1016/j.sna.2016.04.055
10.1088/1361-6439/abf32e
10.1088/1361-6501/abfe33
10.3390/s140101394
10.1109/JSEN.2021.3095762
10.1109/ACCESS.2019.2909973
10.3390/mi9050246
10.3390/mi11060586
10.1142/S0217984920504229
10.3390/mi13111807
10.1109/TSMC.2020.2981807
10.1016/j.measurement.2019.106947
10.1016/j.mee.2019.111112
10.1109/ACCESS.2020.2977223
10.1155/2018/2830686
10.3390/mi10040248
10.1109/ACCESS.2019.2951612
10.3390/app11031129
10.1109/ACCESS.2021.3094120
10.1142/S0218126620501984
10.1016/j.ymssp.2015.11.004
10.1108/IJICC-11-2018-0152
10.1007/s00542-017-3524-4
10.1007/s10489-022-03734-7
10.1016/j.ymssp.2017.05.003
10.3390/s16010071
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Issue 12
Keywords MEMS gyroscope
convolutional neural networks—long short-term memory (CNN-LSTM)
temperature compensation
variational modal decomposition (VMD)
particle swarm optimization—support vector machines (PSO-SVM)
Language English
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References Huang (ref_26) 2022; 71
Cao (ref_10) 2018; 98
Cao (ref_15) 2018; 2018
ref_31
ref_30
Shi (ref_18) 2019; 12
Wang (ref_13) 2020; 34
Chong (ref_14) 2016; 72
ref_17
Nesterenko (ref_7) 2014; 4
Fu (ref_9) 2017; 31
Cao (ref_28) 2021; 21
Guo (ref_8) 2017; 24
Cao (ref_12) 2020; 8
Bu (ref_4) 2021; 31
ref_25
Ma (ref_19) 2019; 7
Yin (ref_3) 2020; 29
Cui (ref_2) 2019; 148
ref_21
ref_20
ref_1
Song (ref_22) 2019; 217
Cao (ref_29) 2021; 9
Cao (ref_11) 2019; 7
Ding (ref_23) 2021; 32
ref_27
Shen (ref_16) 2016; 245
Xia (ref_5) 2014; 14
Zhang (ref_24) 2020; 51
ref_6
References_xml – volume: 71
  start-page: 1
  year: 2022
  ident: ref_26
  article-title: A MEMS IMU Gyroscope Calibration Method Based on Deep Learning
  publication-title: IEEE Trans. Instrum. Meas.
– volume: 31
  start-page: 17500646
  year: 2017
  ident: ref_9
  article-title: A temperature characteristic research and compensation design for micro-machined gyroscope
  publication-title: Mod. Phys. Lett. B
  doi: 10.1142/S0217984917500646
– ident: ref_21
  doi: 10.3390/mi10120823
– ident: ref_30
  doi: 10.3390/electronics9030499
– volume: 4
  start-page: 1598
  year: 2014
  ident: ref_7
  article-title: Temperature Error Compensation in Two-Component Microelectromechanical Gyroscope
  publication-title: IEEE Trans. Compon. Packag. Manuf. Technol.
  doi: 10.1109/TCPMT.2014.2327958
– volume: 245
  start-page: 160
  year: 2016
  ident: ref_16
  article-title: Multi-scale parallel temperature error processing for dual-mass MEMS gyroscope
  publication-title: Sens. Actuators A Phys.
  doi: 10.1016/j.sna.2016.04.055
– volume: 31
  start-page: 065002
  year: 2021
  ident: ref_4
  article-title: Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/1361-6439/abf32e
– volume: 32
  start-page: 095112
  year: 2021
  ident: ref_23
  article-title: A signal de-noising method for a MEMS gyroscope based on improved VMD-WTD
  publication-title: Meas. Sci. Technol.
  doi: 10.1088/1361-6501/abfe33
– volume: 14
  start-page: 1394
  year: 2014
  ident: ref_5
  article-title: The Development of Micromachined Gyroscope Structure and Circuitry Technology
  publication-title: Sensors
  doi: 10.3390/s140101394
– volume: 21
  start-page: 19815
  year: 2021
  ident: ref_28
  article-title: Design, Fabrication, and Experiment of a Decoupled Multi-Frame Vibration MEMS Gyroscope
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2021.3095762
– volume: 7
  start-page: 49111
  year: 2019
  ident: ref_11
  article-title: Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2019.2909973
– ident: ref_17
  doi: 10.3390/mi9050246
– ident: ref_20
  doi: 10.3390/mi11060586
– volume: 34
  start-page: 2050422
  year: 2020
  ident: ref_13
  article-title: A digital output MEMS DRG on-chip temperature compensation method based on virtual sensor
  publication-title: Mod. Phys. Lett. B
  doi: 10.1142/S0217984920504229
– ident: ref_31
  doi: 10.3390/mi13111807
– volume: 51
  start-page: 7764
  year: 2020
  ident: ref_24
  article-title: Serial-Parallel Estimation Model-Based Sliding Mode Control of MEMS Gyroscopes
  publication-title: IEEE Trans. Syst. Man Cybern. Syst.
  doi: 10.1109/TSMC.2020.2981807
– volume: 148
  start-page: 106947
  year: 2019
  ident: ref_2
  article-title: Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method
  publication-title: Measurement
  doi: 10.1016/j.measurement.2019.106947
– volume: 217
  start-page: 111112
  year: 2019
  ident: ref_22
  article-title: MEMS gyroscope wavelet de-noising method based on redundancy and sparse representation
  publication-title: Microelectron. Eng.
  doi: 10.1016/j.mee.2019.111112
– volume: 8
  start-page: 48074
  year: 2020
  ident: ref_12
  article-title: Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-Loop System
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2020.2977223
– volume: 2018
  start-page: 2830686
  year: 2018
  ident: ref_15
  article-title: Temperature Energy Influence Compensation for MEMS Vibration Gyroscope Based on RBF NN-GA-KF Method
  publication-title: Shock Vib.
  doi: 10.1155/2018/2830686
– ident: ref_1
  doi: 10.3390/mi10040248
– volume: 7
  start-page: 169979
  year: 2019
  ident: ref_19
  article-title: A Parallel Denoising Model for Dual-Mass MEMS Gyroscope Based on PE-ITD and SA-ELM
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2019.2951612
– ident: ref_6
  doi: 10.3390/app11031129
– volume: 9
  start-page: 95180
  year: 2021
  ident: ref_29
  article-title: A Temperature Compensation Approach for Dual-Mass MEMS Gyroscope Based on PE-LCD and ANFIS
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2021.3094120
– volume: 29
  start-page: 12
  year: 2020
  ident: ref_3
  article-title: A Phase Self-Correction Method for Bias TemperatureDrift Suppression of MEMS Gyroscopes
  publication-title: J. Circuits Syst. Comput.
  doi: 10.1142/S0218126620501984
– volume: 72
  start-page: 897
  year: 2016
  ident: ref_14
  article-title: Temperature drift modeling of MEMS gyroscope based on genetic-Elman neural network
  publication-title: Mech. Syst. Signal Process.
  doi: 10.1016/j.ymssp.2015.11.004
– volume: 12
  start-page: 274
  year: 2019
  ident: ref_18
  article-title: LSTM based prediction algorithm and abnormal change detection for temperature in aerospace gyroscope shell
  publication-title: Int. J. Intell. Comput. Cybern.
  doi: 10.1108/IJICC-11-2018-0152
– volume: 24
  start-page: 1453
  year: 2017
  ident: ref_8
  article-title: Design and FEM simulation for a novel resonant silicon MEMS gyroscope with temperature compensation function
  publication-title: Microsyst. Technol.
  doi: 10.1007/s00542-017-3524-4
– ident: ref_25
  doi: 10.1007/s10489-022-03734-7
– volume: 98
  start-page: 448
  year: 2018
  ident: ref_10
  article-title: Sensing mode coupling analysis for dual-mass MEMS gyroscope and bandwidth expansion within wide-temperature range
  publication-title: Mech. Syst. Signal Process.
  doi: 10.1016/j.ymssp.2017.05.003
– ident: ref_27
  doi: 10.3390/s16010071
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Snippet The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle...
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SubjectTerms Accuracy
Algorithms
Angular velocity
Applications programs
Artificial neural networks
Bias
Calibration
Consumer electronics
convolutional neural networks—long short-term memory (CNN-LSTM)
Deep learning
Design
Genetic algorithms
Gyroscopes
Inertia
Machine learning
Mathematical optimization
MEMS gyroscope
Microelectromechanical systems
Mobile computing
Navigation systems
Neural networks
Noise reduction
Particle swarm optimization
particle swarm optimization—support vector machines (PSO-SVM)
Random walk
Sensors
Support vector machines
Temperature compensation
Temperature effects
variational modal decomposition (VMD)
Velocity
Wavelet transforms
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Title Improved VMD-ELM Algorithm for MEMS Gyroscope of Temperature Compensation Model Based on CNN-LSTM and PSO-SVM
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